3-D surface inspection using interferometric grating and 2-D FFT based technique

Y. Y. Hung; S. H. Tang; Q. Zhu

3-D surface inspection using interferometric grating and 2-D FFT based technique

Y. Y. Hung, S. H. Tang, Q. Zhu

Research output: Contribution to journal › Conference article › peer-review

Abstract

A new method, based on the combination of interferometric grating projection technique and two-dimensional digital FFT (Fast Fourier Transformation) based phase-measurement technique, for three-dimensional shape measurement and surface inspection is presented in this paper. The projection technique generates an interferometric grating focusing everywhere in its illuminating space so that there is no focusing problem in this new technique. The phase measurement technique provides better separation of the desired depth information from noises and is capable of extracting accurate phase value at every pixel point. Consequently, the new method can obtain depth information corresponding to each pixel point in a high precision.

Original language	English (US)
Pages (from-to)	696-703
Number of pages	8
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	1332
Issue number	pt 2
State	Published - 1990
Externally published	Yes
Event	Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection - San Diego, CA, USA Duration: Jul 8 1990 → Jul 13 1990

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Cite this

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title = "3-D surface inspection using interferometric grating and 2-D FFT based technique",

abstract = "A new method, based on the combination of interferometric grating projection technique and two-dimensional digital FFT (Fast Fourier Transformation) based phase-measurement technique, for three-dimensional shape measurement and surface inspection is presented in this paper. The projection technique generates an interferometric grating focusing everywhere in its illuminating space so that there is no focusing problem in this new technique. The phase measurement technique provides better separation of the desired depth information from noises and is capable of extracting accurate phase value at every pixel point. Consequently, the new method can obtain depth information corresponding to each pixel point in a high precision.",

author = "Hung, {Y. Y.} and Tang, {S. H.} and Q. Zhu",

year = "1990",

language = "English (US)",

volume = "1332",

pages = "696--703",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

number = "pt 2",

note = "Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection ; Conference date: 08-07-1990 Through 13-07-1990",

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TY - JOUR

T1 - 3-D surface inspection using interferometric grating and 2-D FFT based technique

AU - Hung, Y. Y.

AU - Tang, S. H.

AU - Zhu, Q.

PY - 1990

Y1 - 1990

N2 - A new method, based on the combination of interferometric grating projection technique and two-dimensional digital FFT (Fast Fourier Transformation) based phase-measurement technique, for three-dimensional shape measurement and surface inspection is presented in this paper. The projection technique generates an interferometric grating focusing everywhere in its illuminating space so that there is no focusing problem in this new technique. The phase measurement technique provides better separation of the desired depth information from noises and is capable of extracting accurate phase value at every pixel point. Consequently, the new method can obtain depth information corresponding to each pixel point in a high precision.

AB - A new method, based on the combination of interferometric grating projection technique and two-dimensional digital FFT (Fast Fourier Transformation) based phase-measurement technique, for three-dimensional shape measurement and surface inspection is presented in this paper. The projection technique generates an interferometric grating focusing everywhere in its illuminating space so that there is no focusing problem in this new technique. The phase measurement technique provides better separation of the desired depth information from noises and is capable of extracting accurate phase value at every pixel point. Consequently, the new method can obtain depth information corresponding to each pixel point in a high precision.

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UR - http://www.scopus.com/inward/citedby.url?scp=0025566684&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:0025566684

SN - 0277-786X

VL - 1332

SP - 696

EP - 703

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

IS - pt 2

T2 - Optical Testing and Metrology III: Recent Advances in Industrial Optical Inspection

Y2 - 8 July 1990 through 13 July 1990

ER -

3-D surface inspection using interferometric grating and 2-D FFT based technique

Abstract

ASJC Scopus subject areas

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