A soft-x-ray-emission investigation of cobalt implanted silicon crystals

J. J. Jia; T. A. Callcott; W. L. O'Brien; Q. Y. Dong; D. R. Mueller; J. E. Rubensson; D. L. Ederer; Z. Tan; F. Namavar; J. I. Budnick

doi:10.1063/1.347508

A soft-x-ray-emission investigation of cobalt implanted silicon crystals

J. J. Jia, T. A. Callcott, W. L. O'Brien, Q. Y. Dong, D. R. Mueller, J. E. Rubensson, D. L. Ederer, Z. Tan, F. Namavar, J. I. Budnick

Orthopaedic Surgery & Rehabilitation

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5 Scopus citations

Abstract

The Si L_2,3 emission spectra of silicon crystals implanted with Co at doses of (1-8) × 10¹⁷ Co/cm² have been examined using soft-x-ray-emission (SXE) spectroscopy. At the lowest dose, the spectra are little modified from that of crystalline Si, indicating that only a small fraction of Si is in the form of silicides within the probe depth of SXE spectroscopy. For higher doses and implant profiles with Co extending to the surface, there is clear evidence for ordered CoSi₂ combined with richer Co phases, but little evidence for pure Si or for ordered regions of CoSi.

Original language	English (US)
Pages (from-to)	7800-7804
Number of pages	5
Journal	Journal of Applied Physics
Volume	69
Issue number	11
DOIs	https://doi.org/10.1063/1.347508
State	Published - 1991

ASJC Scopus subject areas

Physics and Astronomy(all)

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title = "A soft-x-ray-emission investigation of cobalt implanted silicon crystals",

abstract = "The Si L2,3 emission spectra of silicon crystals implanted with Co at doses of (1-8) × 1017 Co/cm2 have been examined using soft-x-ray-emission (SXE) spectroscopy. At the lowest dose, the spectra are little modified from that of crystalline Si, indicating that only a small fraction of Si is in the form of silicides within the probe depth of SXE spectroscopy. For higher doses and implant profiles with Co extending to the surface, there is clear evidence for ordered CoSi2 combined with richer Co phases, but little evidence for pure Si or for ordered regions of CoSi.",

author = "Jia, {J. J.} and Callcott, {T. A.} and O'Brien, {W. L.} and Dong, {Q. Y.} and Mueller, {D. R.} and Rubensson, {J. E.} and Ederer, {D. L.} and Z. Tan and F. Namavar and Budnick, {J. I.}",

year = "1991",

doi = "10.1063/1.347508",

language = "English (US)",

volume = "69",

pages = "7800--7804",

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TY - JOUR

T1 - A soft-x-ray-emission investigation of cobalt implanted silicon crystals

AU - Jia, J. J.

AU - Callcott, T. A.

AU - O'Brien, W. L.

AU - Dong, Q. Y.

AU - Mueller, D. R.

AU - Rubensson, J. E.

AU - Ederer, D. L.

AU - Tan, Z.

AU - Namavar, F.

AU - Budnick, J. I.

PY - 1991

Y1 - 1991

N2 - The Si L2,3 emission spectra of silicon crystals implanted with Co at doses of (1-8) × 1017 Co/cm2 have been examined using soft-x-ray-emission (SXE) spectroscopy. At the lowest dose, the spectra are little modified from that of crystalline Si, indicating that only a small fraction of Si is in the form of silicides within the probe depth of SXE spectroscopy. For higher doses and implant profiles with Co extending to the surface, there is clear evidence for ordered CoSi2 combined with richer Co phases, but little evidence for pure Si or for ordered regions of CoSi.

AB - The Si L2,3 emission spectra of silicon crystals implanted with Co at doses of (1-8) × 1017 Co/cm2 have been examined using soft-x-ray-emission (SXE) spectroscopy. At the lowest dose, the spectra are little modified from that of crystalline Si, indicating that only a small fraction of Si is in the form of silicides within the probe depth of SXE spectroscopy. For higher doses and implant profiles with Co extending to the surface, there is clear evidence for ordered CoSi2 combined with richer Co phases, but little evidence for pure Si or for ordered regions of CoSi.

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