Acoustic emission in laser surface cleaning for reed-time monitoring

Yong Feng Lu, Yoshinobu Aoyagi

Research output: Contribution to journalArticlepeer-review

28 Scopus citations


Real-time monitoring of surface cleanness in laser dry cleaning has been achieved by monitoring the acous waves emitted from the substrate surface under pulsed laser irradiation. It is found that the acoustic wave emitt from the surface under laser irradiation can reflect the surface condition, i.e., the surface cleanness. Removal surface contaminants can result in a weakened laser-induced acoustic wave. The surface cleanness, therefore, c be monitored in real time by detecting the amplitude and frequency of the acoustic wave during the laser clean! process. This phenomenon provides the laser cleaning system with real-time feedback during the cleaning proce.

Original languageEnglish (US)
Pages (from-to)L1557-L1560
JournalJapanese Journal of Applied Physics
Issue number11
StatePublished - Nov 1995
Externally publishedYes


  • Acoustic emission
  • Excimer laser
  • Laser cleaning
  • Real-time monitoring

ASJC Scopus subject areas

  • Engineering(all)
  • Physics and Astronomy(all)


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