Acoustic wave monitoring in pulsed laser interaction with materials

Y. F. Lu; M. H. Hong; S. J. Chua; T. S. Low

Acoustic wave monitoring in pulsed laser interaction with materials

Y. F. Lu, M. H. Hong, S. J. Chua, T. S. Low

Research output: Contribution to journal › Conference article › peer-review

Abstract

Pulsed excimer lasers have been proven very useful in material processing, such as laser ablation of materials and the cleaning of material surfaces. It is desirable to introduce a suitable real-time monitoring probe to control the laser processing. In this work, audible acoustic waves generated during laser interaction with materials is studied, thus monitoring the interaction and reflecting the nature of interaction such as laser ablation and surface cleaning. The spectral analysis method, fast Fourier transform (FFT) allowed to study the acoustic wave generation and to establish relationship between the acoustic waves and laser ablation rate or cleaning efficiency.

Original language	English (US)
Pages (from-to)	2
Number of pages	2
Journal	LEOS Summer Topical Meeting
State	Published - 1996
Externally published	Yes
Event	Proceedings of the 1996 IEEE/LEOS Summer Topical Meeting - Keystone, CO, USA Duration: Aug 5 1996 → Aug 9 1996

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics
Electrical and Electronic Engineering

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title = "Acoustic wave monitoring in pulsed laser interaction with materials",

abstract = "Pulsed excimer lasers have been proven very useful in material processing, such as laser ablation of materials and the cleaning of material surfaces. It is desirable to introduce a suitable real-time monitoring probe to control the laser processing. In this work, audible acoustic waves generated during laser interaction with materials is studied, thus monitoring the interaction and reflecting the nature of interaction such as laser ablation and surface cleaning. The spectral analysis method, fast Fourier transform (FFT) allowed to study the acoustic wave generation and to establish relationship between the acoustic waves and laser ablation rate or cleaning efficiency.",

author = "Lu, {Y. F.} and Hong, {M. H.} and Chua, {S. J.} and Low, {T. S.}",

year = "1996",

language = "English (US)",

pages = "2",

journal = "LEOS Summer Topical Meeting",

issn = "1099-4742",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

note = "Proceedings of the 1996 IEEE/LEOS Summer Topical Meeting ; Conference date: 05-08-1996 Through 09-08-1996",

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T1 - Acoustic wave monitoring in pulsed laser interaction with materials

AU - Lu, Y. F.

AU - Hong, M. H.

AU - Chua, S. J.

AU - Low, T. S.

PY - 1996

Y1 - 1996

N2 - Pulsed excimer lasers have been proven very useful in material processing, such as laser ablation of materials and the cleaning of material surfaces. It is desirable to introduce a suitable real-time monitoring probe to control the laser processing. In this work, audible acoustic waves generated during laser interaction with materials is studied, thus monitoring the interaction and reflecting the nature of interaction such as laser ablation and surface cleaning. The spectral analysis method, fast Fourier transform (FFT) allowed to study the acoustic wave generation and to establish relationship between the acoustic waves and laser ablation rate or cleaning efficiency.

AB - Pulsed excimer lasers have been proven very useful in material processing, such as laser ablation of materials and the cleaning of material surfaces. It is desirable to introduce a suitable real-time monitoring probe to control the laser processing. In this work, audible acoustic waves generated during laser interaction with materials is studied, thus monitoring the interaction and reflecting the nature of interaction such as laser ablation and surface cleaning. The spectral analysis method, fast Fourier transform (FFT) allowed to study the acoustic wave generation and to establish relationship between the acoustic waves and laser ablation rate or cleaning efficiency.

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SP - 2

JO - LEOS Summer Topical Meeting

JF - LEOS Summer Topical Meeting

SN - 1099-4742

T2 - Proceedings of the 1996 IEEE/LEOS Summer Topical Meeting

Y2 - 5 August 1996 through 9 August 1996

ER -