Additive and subtractive 3D-microfabrication of micro/nanostructures

Y. F. Lu, W. Xiong, L. J. Jiang, Y. S. Zhou, Y. Gao, T. Baldacchini, J. F. Silvain, L. Jiang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish (US)
Title of host publicationEuropean Conference on Lasers and Electro-Optics, CLEO 2015
PublisherOSA - The Optical Society
ISBN (Print)9781467374750
StatePublished - Jul 21 2014
EventEuropean Conference on Lasers and Electro-Optics, CLEO 2015 - Munich, Germany
Duration: Jun 21 2015Jun 25 2015

Publication series

NameOptics InfoBase Conference Papers

Other

OtherEuropean Conference on Lasers and Electro-Optics, CLEO 2015
Country/TerritoryGermany
CityMunich
Period6/21/156/25/15

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials

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