@inproceedings{d04fccdcd99744cdbb74db0d46ab2600,
title = "Additive and subtractive 3D-microfabrication of micro/nanostructures",
author = "Lu, {Y. F.} and W. Xiong and Jiang, {L. J.} and Zhou, {Y. S.} and Y. Gao and T. Baldacchini and Silvain, {J. F.} and L. Jiang",
note = "Copyright: Copyright 2020 Elsevier B.V., All rights reserved.; 2015 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference, CLEO/Europe-EQEC 2015 ; Conference date: 21-06-2015 Through 25-06-2015",
year = "2015",
language = "English (US)",
series = "Proceedings 2015 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference, CLEO/Europe-EQEC 2015",
publisher = "Optical Society of America",
booktitle = "Proceedings 2015 European Conference on Lasers and Electro-Optics - European Quantum Electronics Conference, CLEO/Europe-EQEC 2015",
}