@inproceedings{669ad7323e614496b8fba84928b75d57,
title = "Advanced laser applications in microelectronics and data storage devices (invited)",
abstract = "Laser microprocessing has been extensively studies with applications in microelectronics and magnetic data storage. In addition to the fundamental aspects of laser materials interactions, we have investigated various possible applications of laser microprocessing in different areas. Laser cleaning has been studies systematically both theoretically and experimentally for dry surface cleaning and steam surface cleaning. This technology has been applied for cleaning magnetic head, magnetic sliders, suspension, laser mold cleaning and laser deflash for IC packages. Laser texturing and related processes such as laser bumping, laser tagging have been studied for magnetic recording applications. The future prospects of using laser microprocessing for applications in formation of ultrashallow (less than 50 nm) pn junction for next-generation MOS devices, laser generation of Si nanoparticles for quantum-dot flash memory, light emission devices and low cost and smart photonics devices will be addressed.",
author = "Lu, {Y. F.} and Song, {W. D.} and Ren, {Z. M.} and An, {C. W.} and Liu, {D. M.} and Wang, {W. J.} and Cho, {B. J.} and Zeng, {J. N.} and Tan, {C. F.}",
year = "2002",
language = "English (US)",
isbn = "0912035722",
series = "ICALEO 2002 - 21st International Congress on Applications of Laser and Electro-Optics, Congress Proceedings",
booktitle = "ICALEO 2002 - 21st International Congress on Applications of Laser and Electro-Optics, Congress Proceedings",
note = "ICALEO 2002 - 21st International Congress on Applications of Laser and Electro-Optics ; Conference date: 14-10-2002 Through 17-10-2002",
}