TY - GEN
T1 - Aging effects of as-deposited and passivated cobalt slanted columnar thin films
AU - Schmidt, Daniel
AU - Schubert, Eva
AU - Schubert, Mathias
N1 - Funding Information:
The authors acknowledge financial support from the National Science Foundation in RII (EPS-1004094) and CAREER (ECCS-0846329), the University of Nebraska-Lincoln, and the J.A. Woollam Foundation.
PY - 2011
Y1 - 2011
N2 - Aging effects of as-deposited and passivated slanted columnar thin films from cobalt determined by generalized ellipsometry within the visible spectral region are reported. Slanted columnar thin films have been grown by glancing angle electron beam deposition and subsequently coated with Al2O 3 by an atomic layer deposition process. An anisotropic Bruggeman effective medium approximation developed for highly ordered three dimensional metal nanostructures is employed to analyze spectroscopic Mueller matrix ellipsometry data. Our model approach allows for determination of biaxial optical and structural properties as well as fractions of multiple film constituents. While the optical properties of the uncoated film change over time, the alumina passivation layer prevents oxidation in air and therefore aging effects; however, it affects the intrinsic bulk-like Co optical properties.
AB - Aging effects of as-deposited and passivated slanted columnar thin films from cobalt determined by generalized ellipsometry within the visible spectral region are reported. Slanted columnar thin films have been grown by glancing angle electron beam deposition and subsequently coated with Al2O 3 by an atomic layer deposition process. An anisotropic Bruggeman effective medium approximation developed for highly ordered three dimensional metal nanostructures is employed to analyze spectroscopic Mueller matrix ellipsometry data. Our model approach allows for determination of biaxial optical and structural properties as well as fractions of multiple film constituents. While the optical properties of the uncoated film change over time, the alumina passivation layer prevents oxidation in air and therefore aging effects; however, it affects the intrinsic bulk-like Co optical properties.
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U2 - 10.1557/opl.2012.393
DO - 10.1557/opl.2012.393
M3 - Conference contribution
AN - SCOPUS:84879493066
SN - 9781627482233
T3 - Materials Research Society Symposium Proceedings
SP - 13
EP - 18
BT - Functional Semiconductor Nanocrystals and Metal-Hybrid Structures
T2 - 2011 MRS Fall Meeting
Y2 - 28 November 2011 through 2 December 2011
ER -