Amorphous hydrogenated carbon synthesized by pulsed laser deposition from cyclohexane

Y. F. Lu, S. M. Huang, C. H.A. Huan, X. F. Luo

Research output: Contribution to journalArticlepeer-review

31 Scopus citations


It is demonstrated that a liquid hydrocarbon precursor, cyclohexane, is appropriate for laser-induced carbon deposition. Amorphous hydrogenated carbon films (a-C:H) were deposited by KrF excimer laser irradiation of single-crystal silicon surface immersed under cyclohexane. The technique is simple and easy to operate. IR absorption spectra of the deposited films confirmed the presence of carbon in the diamond phase. Raman and XPS studies showed diamond-like character of the deposited films. Moreover, these two studies provided strong evidence that laser fluence played an important role in the formation of DLC bondings and the quality of the deposited films.

Original languageEnglish (US)
Pages (from-to)647-651
Number of pages5
JournalApplied Physics A: Materials Science and Processing
Issue number6
StatePublished - Jun 1999
Externally publishedYes

ASJC Scopus subject areas

  • Chemistry(all)
  • Materials Science(all)


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