AMORPHOUS HYDROGENATED DIAMONDLIKE CARBON DIELECTRIC FILMS.

John A. Woollam, George H. Bu-Abbud, Jae Oh, Paul G. Snyder, Joel D. Lamb, David C. Ingram, A. K. Rai

Research output: Contribution to journalConference articlepeer-review

2 Scopus citations

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Engineering & Materials Science