An overview of laser microprocessing in data storage industry

T. C. Chong, Y. F. Lu

Research output: Contribution to journalConference articlepeer-review

1 Scopus citations


An overview of laser microprocessing in data storage industry was presented. Real-time monitoring of laser surface processing was investigated to improve the performance of laser microprocessing technology. Laser nano-etching and nanolithography were realized by atomic force microscopy (AFM) tip-enhanced laser irradiation through combination of laser microprocessing and scanning profile microscope (SPM) techniques.

Original languageEnglish (US)
Pages (from-to)17-24
Number of pages8
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 2002
Externally publishedYes
EventSecond International Symposium on Laser Precision Microfabrication - Singapore, Singapore
Duration: May 16 2001May 18 2001


  • Data storage
  • Laser bumping
  • Laser cleaning
  • Laser microprocessing
  • Laser nanoprocessing
  • Laser texturing

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering

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