Analysis of thickness vibrations of C-axis inclined aluminum-nitrogen thin film resonators

Haifeng Zhang; Joseph A. Turner; John A. Kosinski

doi:10.1080/10584581003785476

Analysis of thickness vibrations of C-axis inclined aluminum-nitrogen thin film resonators

Haifeng Zhang, Joseph A. Turner, John A. Kosinski

Mechanical & Materials Engineering

Research output: Contribution to journal › Conference article › peer-review

15 Scopus citations

Abstract

The effect of the C-axis angle of inclination on the thickness vibration modes of Thin Film Bulk Acoustic Wave Resonators (FBAR) is discussed. Theoretical analysis for the frequency equation and mode shape of C-axis inclined FBAR connected with an external impedance is carried out. The impedance characteristics of FBAR are derived and compared with previous experimental results.

Original language	English (US)
Pages (from-to)	95-108
Number of pages	14
Journal	Integrated Ferroelectrics
Volume	113
Issue number	1
DOIs	https://doi.org/10.1080/10584581003785476
State	Published - 2009
Event	21st International Symposium on Integrated Ferroelectrics and Functionalities, ISIF2 2009 - Colorado Springs, CO, United States Duration: Sep 27 2009 → Sep 30 2009

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Control and Systems Engineering
Ceramics and Composites
Condensed Matter Physics
Electrical and Electronic Engineering
Materials Chemistry

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10.1080/10584581003785476

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title = "Analysis of thickness vibrations of C-axis inclined aluminum-nitrogen thin film resonators",

abstract = "The effect of the C-axis angle of inclination on the thickness vibration modes of Thin Film Bulk Acoustic Wave Resonators (FBAR) is discussed. Theoretical analysis for the frequency equation and mode shape of C-axis inclined FBAR connected with an external impedance is carried out. The impedance characteristics of FBAR are derived and compared with previous experimental results.",

author = "Haifeng Zhang and Turner, {Joseph A.} and Kosinski, {John A.}",

note = "Funding Information: This research was supported by the Army Research Office under Grant No. DAAD19-01-1-0443.; 21st International Symposium on Integrated Ferroelectrics and Functionalities, ISIF2 2009 ; Conference date: 27-09-2009 Through 30-09-2009",

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doi = "10.1080/10584581003785476",

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AU - Zhang, Haifeng

AU - Turner, Joseph A.

AU - Kosinski, John A.

N1 - Funding Information: This research was supported by the Army Research Office under Grant No. DAAD19-01-1-0443.

PY - 2009

Y1 - 2009

N2 - The effect of the C-axis angle of inclination on the thickness vibration modes of Thin Film Bulk Acoustic Wave Resonators (FBAR) is discussed. Theoretical analysis for the frequency equation and mode shape of C-axis inclined FBAR connected with an external impedance is carried out. The impedance characteristics of FBAR are derived and compared with previous experimental results.

AB - The effect of the C-axis angle of inclination on the thickness vibration modes of Thin Film Bulk Acoustic Wave Resonators (FBAR) is discussed. Theoretical analysis for the frequency equation and mode shape of C-axis inclined FBAR connected with an external impedance is carried out. The impedance characteristics of FBAR are derived and compared with previous experimental results.

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DO - 10.1080/10584581003785476

M3 - Conference article

AN - SCOPUS:79955519793

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JO - Integrated Ferroelectrics

JF - Integrated Ferroelectrics

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Y2 - 27 September 2009 through 30 September 2009

ER -

Analysis of thickness vibrations of C-axis inclined aluminum-nitrogen thin film resonators

Abstract

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