Analysis of thickness vibrations of C-axis inclined aluminum-nitrogen thin film resonators

Haifeng Zhang, Joseph A. Turner, John A. Kosinski

Research output: Contribution to journalConference article

14 Scopus citations

Abstract

The effect of the C-axis angle of inclination on the thickness vibration modes of Thin Film Bulk Acoustic Wave Resonators (FBAR) is discussed. Theoretical analysis for the frequency equation and mode shape of C-axis inclined FBAR connected with an external impedance is carried out. The impedance characteristics of FBAR are derived and compared with previous experimental results.

Original languageEnglish (US)
Pages (from-to)95-108
Number of pages14
JournalIntegrated Ferroelectrics
Volume113
Issue number1
DOIs
StatePublished - 2009
Event21st International Symposium on Integrated Ferroelectrics and Functionalities, ISIF2 2009 - Colorado Springs, CO, United States
Duration: Sep 27 2009Sep 30 2009

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Control and Systems Engineering
  • Ceramics and Composites
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

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