Abstract
The maximum experimental sensitivity in ellipsometric measurements for samples that include a composite (two-layer) film on a substrate is treated with mathematical generality. A detailed theoretical computation is made for a system consisting of a moderately thick film on a substrate and including either an interface layer between the film and substrate or a thin surface layer on top of the moderately thick film. Analytical conditions for the sensitivity of p or s wave suppression are determined. For the air/SiO2/Si system a numerical calculation is performed to determine the optimum sensitivity for interfacial layer studies.
Original language | English (US) |
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Pages (from-to) | 183-196 |
Number of pages | 14 |
Journal | Thin Solid Films |
Volume | 123 |
Issue number | 3 |
DOIs | |
State | Published - Jan 18 1985 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Surfaces and Interfaces
- Surfaces, Coatings and Films
- Metals and Alloys
- Materials Chemistry