Anisotropy modulations of femtosecond laser pulse induced periodic surface structures on silicon by adjusting double pulse delay

Weina Han, Lan Jiang, Xiaowei Li, Qingsong Wang, Hao Li, Yongfeng Lu

Research output: Contribution to journalArticle

12 Scopus citations

Abstract

We demonstrate that the polarization-dependent anisotropy of the laser-induced periodic surface structure (LIPSS) on silicon can be adjusted by designing a femtosecond laser pulse train (800 nm, 50 fs, 1 kHz). By varying the pulse delay from 100 to 1600 fs within a double pulse train to reduce the deposited pulse energy, which weakens the directional surface plasmon polarition (SPP)-laser energy coupling based on the initial formed ripple structure, the polarization-dependent geometrical morphology of the LIPSS evolves from a nearly isotropic circular shape to a somewhat elongated elliptical shape. Meanwhile, the controllable anisotropy of the two-dimensional scanned-line widths with different directions is achieved based on a certain pulse delay combined with the scanning speed. This can effectively realize better control over large-area uniform LIPSS formation. As an example, we further show that the large-area LIPSS can be formed with different scanning times under different pulse delays.

Original languageEnglish (US)
Pages (from-to)15820-15828
Number of pages9
JournalOptics Express
Volume22
Issue number13
DOIs
StatePublished - Jun 30 2014

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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