Abstract
We determine the anisotropic electron effective mass and mobility parameters in wurtzite InN thin films with free electron concentration N from 1.8 × 1017 cm-3 to 9.5 × 1018 cm-3 using Infrared Magneto-optic Generalized Ellipsometry. The room-temperature measurements were carried out with magnetic fields up to 4.5 T. For the Γ-point we estimate m⊥* = 0.047m 0 and m∥* = 0.039m0 for polarization perpendicular and parallel to the c-axis, respectively. Scattering by impurities or ionized donors may explain the decrease of mobility for polarization parallel to the c-axis from 1600 cm2/(Vs) to 800 cm2/(Vs) with increase in N, where the perpendicular mobility is further decreased, likely caused by additional grain boundary scattering.
Original language | English (US) |
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Pages (from-to) | 1854-1857 |
Number of pages | 4 |
Journal | Physica Status Solidi (C) Current Topics in Solid State Physics |
Volume | 3 |
DOIs | |
State | Published - 2006 |
Externally published | Yes |
Event | 6th International Conference on Nitride Semiconductors, ICNS-6 - Bremen, Germany Duration: Aug 28 2005 → Sep 2 2005 |
ASJC Scopus subject areas
- Condensed Matter Physics