Annealing effects on the optical properties of semiconducting boron carbide

R. B. Billa, T. Hofmann, M. Schubert, B. W. Robertson

Research output: Contribution to journalArticle

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Abstract

Infrared vibrations of as-deposited and annealed semiconducting boron carbide thin films were investigated by midinfrared spectroscopic ellipsometry. The strong boron-hydrogen resonance at ∼2560 cm-1 in as-deposited films reveals considerable hydrogen incorporation during plasma-enhanced chemical vapor deposition. Extended annealing at 600 °C caused significant reduction in film thickness, substantial reduction of boron-hydrogen bond resonance absorption, and development of distinct blue-shifted boron-carbon and icosahedral vibration mode resonances. Our findings suggest that annealing results in substantial loss of hydrogen and in development of icosahedral structure, accompanied by strain relaxation and densification.

Original languageEnglish (US)
Article number033515
JournalJournal of Applied Physics
Volume106
Issue number3
DOIs
StatePublished - Aug 28 2009

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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