Application of generalized ellipsometry to complex optical systems

Mathias Schubert, Bernd Rheinländer, John A. Woollam, Blaine D. Johs, Craig M. Herzinger

Research output: Contribution to journalConference articlepeer-review

11 Scopus citations


We report the extension of the spectroscopic rotating- analyzer- ellipsometry to generalized ellipsometry (GE) in order to define and to determine three essentially normalized elements of the optical JONES matrix J. These elements can be measured in reflection or transmission arrangement regardless of the specific structural and/or anisotropic properties of a particular sample. A 4 by 4- matrix algebra has ben presented for electromagnetic plane waves reflected or transmitted at arbitrarily anisotropic and homogeneous layered systems including a special solution for continuously twisted biaxial materials. This algorithm has a general approach for materials with linear optical response behavior. The optical JONES matrix represents the experimental link to the 4 by 4-matrix algebra. The combination of both, the 4 by 4-matrix algorithm and GE allows for the analysis of complex layered samples containing anisotropic materials. We report on the application of GE to birefringent dielectrics, chiral liquid crystals and spontaneously ordered III-V compounds. From a regression analysis we obtain the intrinsic optical properties of the anisotropic materials.

Original languageEnglish (US)
Pages (from-to)255-265
Number of pages11
JournalProceedings of SPIE - The International Society for Optical Engineering
StatePublished - 1997
EventPolarimetry and Ellipsometry - Kazimierz Dolny, Poland
Duration: May 20 1996May 20 1996


  • Anisotropy
  • Generalized ellipsometry
  • Liquid crystals
  • Optical Jones matrix
  • Refractive indices

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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