Atomic force acoustic microscopy methods to determine thin-film elastic properties

D. C. Hurley, K. Shen, N. M. Jennett, J. A. Turner

Research output: Contribution to journalArticle

141 Scopus citations

Abstract

Elastic properties of thin films were discussed. Atomic force acoustic microscopy (AFAM) methods were observed. Results showed that the values of indentation modulus varied significantly. These methods helps in attaining reliable, accurate measurements of elastic properties on the nanoscale.

Original languageEnglish (US)
Pages (from-to)2347-2354
Number of pages8
JournalJournal of Applied Physics
Volume94
Issue number4
DOIs
StatePublished - Aug 15 2003

ASJC Scopus subject areas

  • Physics and Astronomy(all)

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