Atomic force acoustic microscopy methods to determine thin-film elastic properties

D. C. Hurley; K. Shen; N. M. Jennett; J. A. Turner

doi:10.1063/1.1592632

Atomic force acoustic microscopy methods to determine thin-film elastic properties

D. C. Hurley, K. Shen, N. M. Jennett, J. A. Turner

Research output: Contribution to journal › Article › peer-review

158 Scopus citations

Abstract

Elastic properties of thin films were discussed. Atomic force acoustic microscopy (AFAM) methods were observed. Results showed that the values of indentation modulus varied significantly. These methods helps in attaining reliable, accurate measurements of elastic properties on the nanoscale.

Original language	English (US)
Pages (from-to)	2347-2354
Number of pages	8
Journal	Journal of Applied Physics
Volume	94
Issue number	4
DOIs	https://doi.org/10.1063/1.1592632
State	Published - Aug 15 2003
Externally published	Yes

ASJC Scopus subject areas

General Physics and Astronomy

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10.1063/1.1592632

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@article{dfa56e6ec5214a5aba6a8fb9e507a033,

title = "Atomic force acoustic microscopy methods to determine thin-film elastic properties",

abstract = "Elastic properties of thin films were discussed. Atomic force acoustic microscopy (AFAM) methods were observed. Results showed that the values of indentation modulus varied significantly. These methods helps in attaining reliable, accurate measurements of elastic properties on the nanoscale.",

author = "Hurley, {D. C.} and K. Shen and Jennett, {N. M.} and Turner, {J. A.}",

year = "2003",

month = aug,

day = "15",

doi = "10.1063/1.1592632",

language = "English (US)",

volume = "94",

pages = "2347--2354",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "4",

}

TY - JOUR

T1 - Atomic force acoustic microscopy methods to determine thin-film elastic properties

AU - Hurley, D. C.

AU - Shen, K.

AU - Jennett, N. M.

AU - Turner, J. A.

PY - 2003/8/15

Y1 - 2003/8/15

N2 - Elastic properties of thin films were discussed. Atomic force acoustic microscopy (AFAM) methods were observed. Results showed that the values of indentation modulus varied significantly. These methods helps in attaining reliable, accurate measurements of elastic properties on the nanoscale.

AB - Elastic properties of thin films were discussed. Atomic force acoustic microscopy (AFAM) methods were observed. Results showed that the values of indentation modulus varied significantly. These methods helps in attaining reliable, accurate measurements of elastic properties on the nanoscale.

UR - http://www.scopus.com/inward/record.url?scp=0042424601&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0042424601&partnerID=8YFLogxK

U2 - 10.1063/1.1592632

DO - 10.1063/1.1592632

M3 - Article

AN - SCOPUS:0042424601

SN - 0021-8979

VL - 94

SP - 2347

EP - 2354

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 4

ER -

Atomic force acoustic microscopy methods to determine thin-film elastic properties

Abstract

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