Author Correction: Precursor-surface interactions revealed during plasma-enhanced atomic layer deposition of metal oxide thin films by in-situ spectroscopic ellipsometry (Scientific Reports, (2020), 10, 1, (10392), 10.1038/s41598-020-66409-8)

Ufuk Kilic, Alyssa Mock, Derek Sekora, Simeon Gilbert, Shah Valloppilly, Giselle Melendez, Natale Ianno, Marjorie Langell, Eva Schubert, Mathias Schubert

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