Abstract
Ellipsometers have been used to measure the thicknesses of very thin films, such as microelectronics components on ever-shrinking integrated circuits. For nanometer-scale dimensions, ellipsometer are accurate, convenient, economical, and fast. Furthermore, ellipsometer measurements are completely non-destructive, do not require mechanical contact with sample, and can be made easily and rapidly with computer control.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 4 |
| Number of pages | 4 |
| Journal | Industrial Physicist |
| Volume | 2 |
| Issue number | 1 |
| State | Published - Mar 1996 |
| Externally published | Yes |
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)