Ellipsometers have been used to measure the thicknesses of very thin films, such as microelectronics components on ever-shrinking integrated circuits. For nanometer-scale dimensions, ellipsometer are accurate, convenient, economical, and fast. Furthermore, ellipsometer measurements are completely non-destructive, do not require mechanical contact with sample, and can be made easily and rapidly with computer control.
|Original language||English (US)|
|Number of pages||4|
|State||Published - Mar 1996|
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)