Automated spectroscopic ellipsometry

James Hilfiker, John Woollam, Greg Mowry, Peter Chow, James Elman

Research output: Contribution to journalArticle

1 Scopus citations

Abstract

Ellipsometers have been used to measure the thicknesses of very thin films, such as microelectronics components on ever-shrinking integrated circuits. For nanometer-scale dimensions, ellipsometer are accurate, convenient, economical, and fast. Furthermore, ellipsometer measurements are completely non-destructive, do not require mechanical contact with sample, and can be made easily and rapidly with computer control.

Original languageEnglish (US)
Pages (from-to)4
Number of pages4
JournalIndustrial Physicist
Volume2
Issue number1
StatePublished - Mar 1996

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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    Hilfiker, J., Woollam, J., Mowry, G., Chow, P., & Elman, J. (1996). Automated spectroscopic ellipsometry. Industrial Physicist, 2(1), 4.