Biological Element Detection Sensor Application Of Micromachined PZT Thick Film Cantilever

Hyung Joon Kim; Yong Bum Kim; Jaebum Park; Tae Song Kim

Biological Element Detection Sensor Application Of Micromachined PZT Thick Film Cantilever

Hyung Joon Kim, Yong Bum Kim, Jaebum Park, Tae Song Kim

Research output: Contribution to conference › Paper › peer-review

Abstract

A highly sensitive monolithic cantilever sensor for mass detection has been successfully fabricated with PZT (52/48) thick films prepared on Pt/TiO₂/YSZ/SiO₂/Si substrate by new hybrid method based on the screen-printing. The shorter cantilever is more sensitive for mass change and can detect ng level mass change in aqueous environment even though the sensitivity of cantilever decreases due to viscous damping. Also, the capability of thick film cantilever for biosensor application has been verified. It is quantitatively investigated that the resonance frequency change of cantilever can be affected from the biological element binding such as streptavidin-biotin binding and prostate specific antigen (PSA)-antibody interaction on a PSA antibody immobilized Au surface.

Original language	English (US)
Pages	1054-1058
Number of pages	5
State	Published - 2003
Externally published	Yes
Event	Second IEEE International Conference on Sensors: IEEE Sensors 2003 - Toronto, Ont., Canada Duration: Oct 22 2003 → Oct 24 2003

Other

Other	Second IEEE International Conference on Sensors: IEEE Sensors 2003
Country/Territory	Canada
City	Toronto, Ont.
Period	10/22/03 → 10/24/03

Keywords

Biosensor
Cantilever
Thick film

ASJC Scopus subject areas

Electrical and Electronic Engineering

Cite this

@conference{0d272b2b9a2f42bab14400662cb8f0e4,

title = "Biological Element Detection Sensor Application Of Micromachined PZT Thick Film Cantilever",

abstract = "A highly sensitive monolithic cantilever sensor for mass detection has been successfully fabricated with PZT (52/48) thick films prepared on Pt/TiO2/YSZ/SiO2/Si substrate by new hybrid method based on the screen-printing. The shorter cantilever is more sensitive for mass change and can detect ng level mass change in aqueous environment even though the sensitivity of cantilever decreases due to viscous damping. Also, the capability of thick film cantilever for biosensor application has been verified. It is quantitatively investigated that the resonance frequency change of cantilever can be affected from the biological element binding such as streptavidin-biotin binding and prostate specific antigen (PSA)-antibody interaction on a PSA antibody immobilized Au surface.",

keywords = "Biosensor, Cantilever, Thick film",

author = "Kim, {Hyung Joon} and Kim, {Yong Bum} and Jaebum Park and Kim, {Tae Song}",

year = "2003",

language = "English (US)",

pages = "1054--1058",

note = "Second IEEE International Conference on Sensors: IEEE Sensors 2003 ; Conference date: 22-10-2003 Through 24-10-2003",

}

TY - CONF

T1 - Biological Element Detection Sensor Application Of Micromachined PZT Thick Film Cantilever

AU - Kim, Hyung Joon

AU - Kim, Yong Bum

AU - Park, Jaebum

AU - Kim, Tae Song

PY - 2003

Y1 - 2003

N2 - A highly sensitive monolithic cantilever sensor for mass detection has been successfully fabricated with PZT (52/48) thick films prepared on Pt/TiO2/YSZ/SiO2/Si substrate by new hybrid method based on the screen-printing. The shorter cantilever is more sensitive for mass change and can detect ng level mass change in aqueous environment even though the sensitivity of cantilever decreases due to viscous damping. Also, the capability of thick film cantilever for biosensor application has been verified. It is quantitatively investigated that the resonance frequency change of cantilever can be affected from the biological element binding such as streptavidin-biotin binding and prostate specific antigen (PSA)-antibody interaction on a PSA antibody immobilized Au surface.

AB - A highly sensitive monolithic cantilever sensor for mass detection has been successfully fabricated with PZT (52/48) thick films prepared on Pt/TiO2/YSZ/SiO2/Si substrate by new hybrid method based on the screen-printing. The shorter cantilever is more sensitive for mass change and can detect ng level mass change in aqueous environment even though the sensitivity of cantilever decreases due to viscous damping. Also, the capability of thick film cantilever for biosensor application has been verified. It is quantitatively investigated that the resonance frequency change of cantilever can be affected from the biological element binding such as streptavidin-biotin binding and prostate specific antigen (PSA)-antibody interaction on a PSA antibody immobilized Au surface.

KW - Biosensor

KW - Cantilever

KW - Thick film

UR - http://www.scopus.com/inward/record.url?scp=1542363356&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=1542363356&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:1542363356

SP - 1054

EP - 1058

T2 - Second IEEE International Conference on Sensors: IEEE Sensors 2003

Y2 - 22 October 2003 through 24 October 2003

ER -

Biological Element Detection Sensor Application Of Micromachined PZT Thick Film Cantilever

Abstract

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Keywords

ASJC Scopus subject areas

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