Biological Element Detection Sensor Application Of Micromachined PZT Thick Film Cantilever

Hyung Joon Kim, Yong Bum Kim, Jaebum Park, Tae Song Kim

Research output: Contribution to conferencePaperpeer-review

3 Scopus citations

Abstract

A highly sensitive monolithic cantilever sensor for mass detection has been successfully fabricated with PZT (52/48) thick films prepared on Pt/TiO2/YSZ/SiO2/Si substrate by new hybrid method based on the screen-printing. The shorter cantilever is more sensitive for mass change and can detect ng level mass change in aqueous environment even though the sensitivity of cantilever decreases due to viscous damping. Also, the capability of thick film cantilever for biosensor application has been verified. It is quantitatively investigated that the resonance frequency change of cantilever can be affected from the biological element binding such as streptavidin-biotin binding and prostate specific antigen (PSA)-antibody interaction on a PSA antibody immobilized Au surface.

Original languageEnglish (US)
Pages1054-1058
Number of pages5
StatePublished - 2003
EventSecond IEEE International Conference on Sensors: IEEE Sensors 2003 - Toronto, Ont., Canada
Duration: Oct 22 2003Oct 24 2003

Other

OtherSecond IEEE International Conference on Sensors: IEEE Sensors 2003
CountryCanada
CityToronto, Ont.
Period10/22/0310/24/03

Keywords

  • Biosensor
  • Cantilever
  • Thick film

ASJC Scopus subject areas

  • Electrical and Electronic Engineering

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