We have developed a procedure involving normal angle of incidence Kerr spectroscopy, variable angle of incidence spectroscopic ellipsometry, and variable angle of incidence spectroscopic magnetooptic ellipsometry by which it is possible to extract layer thicknesses and optical and magneto-optical constants from individual layers within multilayered structures. The procedure is nondestructive, and we have successfully applied it to several materials systems, one of which is presented here. Additionally, we discuss the advantages and disadvantages of this procedure as a means of studying component layers in multilayer films.
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering