Characterization of modified surface of indium tin oxide film during process of laser patterning

Ji Nan Zeng; Hwee Lin Koh; Zhong Min Ren; Wen Dong Song; Yong Feng Lu

doi:10.1117/12.456855

Characterization of modified surface of indium tin oxide film during process of laser patterning

Ji Nan Zeng, Hwee Lin Koh, Zhong Min Ren, Wen Dong Song, Yong Feng Lu

Electrical & Computer Engineering

Research output: Contribution to journal › Conference article

1 Scopus citations

Abstract

Effect of excimer laser irradiation at different fluences on Indium-Tin-Oxide films has been studied with use of optical transmission, XRD, Micro-Raman spectra and XPS. Surface modification at low fluence of 154 mJ/cm² is observed to cause the increase of optical transmittance at initial several pulses of UV laser. At moderate fluence of 239 mJ/cm², UV laser irradiation results in apparent coloration and chemical compositional change on the ITO surface. XRD results show the grain size of ITO tends to decrease after irradiation. Novel features appear in Raman spectra, which involve the change of surface crystallinity and composition induced by UV laser irradiation. XPS analysis indicates peak shape of O bond is modified post irradiation and Sn/In ratio presents maximum corresponding to dark coloration. ITO films have also been patterned at high fluence of 1-2J/cm² using simple masks. The ablation rate on laser pulse demonstrates linear change. An alternative method for laser patterning is proposed by combination of excimer laser coloration and visible laser patterning.

Original language	English (US)
Pages (from-to)	268-271
Number of pages	4
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	4426
DOIs	https://doi.org/10.1117/12.456855
State	Published - 2002
Event	Second International Symposium on Laser Precision Microfabrication - Singapore, Singapore Duration: May 16 2001 → May 18 2001

Keywords

Indium-Tin-Oxide
KrF excimer laser patterning
Micro-Raman
Optical transmission
XPS
XRD

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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Zeng, J. N., Koh, H. L., Ren, Z. M., Song, W. D., & Lu, Y. F. (2002). Characterization of modified surface of indium tin oxide film during process of laser patterning. Proceedings of SPIE - The International Society for Optical Engineering, 4426, 268-271. https://doi.org/10.1117/12.456855

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title = "Characterization of modified surface of indium tin oxide film during process of laser patterning",

abstract = "Effect of excimer laser irradiation at different fluences on Indium-Tin-Oxide films has been studied with use of optical transmission, XRD, Micro-Raman spectra and XPS. Surface modification at low fluence of 154 mJ/cm2 is observed to cause the increase of optical transmittance at initial several pulses of UV laser. At moderate fluence of 239 mJ/cm2, UV laser irradiation results in apparent coloration and chemical compositional change on the ITO surface. XRD results show the grain size of ITO tends to decrease after irradiation. Novel features appear in Raman spectra, which involve the change of surface crystallinity and composition induced by UV laser irradiation. XPS analysis indicates peak shape of O bond is modified post irradiation and Sn/In ratio presents maximum corresponding to dark coloration. ITO films have also been patterned at high fluence of 1-2J/cm2 using simple masks. The ablation rate on laser pulse demonstrates linear change. An alternative method for laser patterning is proposed by combination of excimer laser coloration and visible laser patterning.",

keywords = "Indium-Tin-Oxide, KrF excimer laser patterning, Micro-Raman, Optical transmission, XPS, XRD",

author = "Zeng, {Ji Nan} and Koh, {Hwee Lin} and Ren, {Zhong Min} and Song, {Wen Dong} and Lu, {Yong Feng}",

year = "2002",

doi = "10.1117/12.456855",

language = "English (US)",

volume = "4426",

pages = "268--271",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

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note = "Second International Symposium on Laser Precision Microfabrication ; Conference date: 16-05-2001 Through 18-05-2001",

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T1 - Characterization of modified surface of indium tin oxide film during process of laser patterning

AU - Zeng, Ji Nan

AU - Koh, Hwee Lin

AU - Ren, Zhong Min

AU - Song, Wen Dong

AU - Lu, Yong Feng

PY - 2002

Y1 - 2002

N2 - Effect of excimer laser irradiation at different fluences on Indium-Tin-Oxide films has been studied with use of optical transmission, XRD, Micro-Raman spectra and XPS. Surface modification at low fluence of 154 mJ/cm2 is observed to cause the increase of optical transmittance at initial several pulses of UV laser. At moderate fluence of 239 mJ/cm2, UV laser irradiation results in apparent coloration and chemical compositional change on the ITO surface. XRD results show the grain size of ITO tends to decrease after irradiation. Novel features appear in Raman spectra, which involve the change of surface crystallinity and composition induced by UV laser irradiation. XPS analysis indicates peak shape of O bond is modified post irradiation and Sn/In ratio presents maximum corresponding to dark coloration. ITO films have also been patterned at high fluence of 1-2J/cm2 using simple masks. The ablation rate on laser pulse demonstrates linear change. An alternative method for laser patterning is proposed by combination of excimer laser coloration and visible laser patterning.

AB - Effect of excimer laser irradiation at different fluences on Indium-Tin-Oxide films has been studied with use of optical transmission, XRD, Micro-Raman spectra and XPS. Surface modification at low fluence of 154 mJ/cm2 is observed to cause the increase of optical transmittance at initial several pulses of UV laser. At moderate fluence of 239 mJ/cm2, UV laser irradiation results in apparent coloration and chemical compositional change on the ITO surface. XRD results show the grain size of ITO tends to decrease after irradiation. Novel features appear in Raman spectra, which involve the change of surface crystallinity and composition induced by UV laser irradiation. XPS analysis indicates peak shape of O bond is modified post irradiation and Sn/In ratio presents maximum corresponding to dark coloration. ITO films have also been patterned at high fluence of 1-2J/cm2 using simple masks. The ablation rate on laser pulse demonstrates linear change. An alternative method for laser patterning is proposed by combination of excimer laser coloration and visible laser patterning.

KW - Indium-Tin-Oxide

KW - KrF excimer laser patterning

KW - Micro-Raman

KW - Optical transmission

KW - XPS

KW - XRD

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