Characterization of Ti-based nanocrystalline ternary nitride films

S. M. Aouadi, J. A. Chladek, F. Namavar, N. Finnegan, S. L. Rohde

Research output: Contribution to journalArticlepeer-review

25 Scopus citations

Abstract

Recently, considerable attention was devoted in using optical techniques to deduce the chemical composition of various materials. In particular, spectroscopic ellipsometry was shown to be a powerful technique in measuring the thickness and optical constants of various materials. This techniques was widely used in the semiconductor, optical and magnetic recording industries and was still at the early development stages in the decorative and protective coating industries.

Original languageEnglish (US)
Pages (from-to)1967-1973
Number of pages7
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume20
Issue number5
DOIs
StatePublished - Sep 2002
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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