Chemical profiling and structural studies of ion-beam-mixed aluminum on silicon

Engineering & Materials Science

• Ion beams 100%
• Ions 65%
• Silicon 55%
• Aluminum 54%
• Xenon 47%
• Annealing 35%
• Rutherford backscattering spectroscopy 32%
• Substrates 24%
• Spectroscopy 19%
• Thin films 16%
• Textures 14%
• Scanning electron microscopy 13%
• Hot Temperature 8%
• Temperature 7%
• Experiments 6%

Physics & Astronomy

• ion beams 54%
• aluminum 48%
• silicon 37%
• xenon 35%
• dosage 35%
• ions 32%
• implantation 31%
• annealing 21%
• integrity 18%
• mass spectroscopy 17%
• backscattering 15%
• textures 14%
• damage 12%
• scanning electron microscopy 11%
• room temperature 9%
• thin films 9%

Chemical Compounds

• Dose 54%
• Alloy 49%
• Nuclear Resonance 37%
• Annealing 37%
• Implanted Ion 33%
• Rutherford Backscattering Spectroscopy 30%
• Ion Beam 25%
• Secondary Ion Mass Spectroscopy 25%
• Crystalline Texture 22%
• Ion 18%
• Scanning Electron Microscopy 14%
• Ambient Reaction Temperature 13%
• Liquid Film 11%