Engineering & Materials Science
Ion beams
100%
Ions
65%
Silicon
55%
Aluminum
54%
Xenon
47%
Annealing
35%
Rutherford backscattering spectroscopy
32%
Substrates
24%
Spectroscopy
19%
Thin films
16%
Textures
14%
Scanning electron microscopy
13%
Hot Temperature
8%
Temperature
7%
Experiments
6%
Physics & Astronomy
ion beams
54%
aluminum
48%
silicon
37%
xenon
35%
dosage
35%
ions
32%
implantation
31%
annealing
21%
integrity
18%
mass spectroscopy
17%
backscattering
15%
textures
14%
damage
12%
scanning electron microscopy
11%
room temperature
9%
thin films
9%
Chemical Compounds
Dose
54%
Alloy
49%
Nuclear Resonance
37%
Annealing
37%
Implanted Ion
33%
Rutherford Backscattering Spectroscopy
30%
Ion Beam
25%
Secondary Ion Mass Spectroscopy
25%
Crystalline Texture
22%
Ion
18%
Scanning Electron Microscopy
14%
Ambient Reaction Temperature
13%
Liquid Film
11%