Chemical vapor deposition and characterization of two-dimensional molybdenum dioxide (MoO2) nanoplatelets

Nataliia S. Vorobeva; Alexey Lipatov; Dmitry S. Muratov; Alexander Sinitskii

doi:10.1088/1361-6528/aae366

Chemical vapor deposition and characterization of two-dimensional molybdenum dioxide (MoO₂) nanoplatelets

Nataliia S. Vorobeva, Alexey Lipatov, Dmitry S. Muratov, Alexander Sinitskii

Research output: Contribution to journal › Article › peer-review

18 Scopus citations

Abstract

We report on the chemical vapor deposition synthesis of MoO₂ nanoplatelets by sublimation of MoO₃ and its reduction in a hydrogen atmosphere at 750 °C. When grown on Si/SiO₂ substrates, the platelets primarily assume a rhomboidal shape and have thicknesses ranging from several to tens of nm. The morphology of MoO₂ crystals was found to depend on the chemical nature of substrates. MoO₂ platelets on Si/SiO₂ were characterized by a number of microscopic and spectroscopic techniques, and the electrical measurements revealed the metallic nature of their conductivity averaging at 2400 ±1000 S cm^-1. Raman spectroscopy of MoO₂ platelets on graphene indicates their strong hole injection property. Small thickness, planar morphology, high chemical stability and metallic conductivity of ultrathin MoO₂ platelets make them potentially interesting for integration different other two-dimensional materials in a variety of electronic structures and devices.

Original language	English (US)
Article number	505707
Journal	Nanotechnology
Volume	29
Issue number	50
DOIs	https://doi.org/10.1088/1361-6528/aae366
State	Published - Oct 12 2018

Keywords

MoO nanoplatelets
chemical vapor deposition
electrical measurements

ASJC Scopus subject areas

Bioengineering
Chemistry(all)
Materials Science(all)
Mechanics of Materials
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

10.1088/1361-6528/aae366

Cite this

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title = "Chemical vapor deposition and characterization of two-dimensional molybdenum dioxide (MoO2) nanoplatelets",

abstract = "We report on the chemical vapor deposition synthesis of MoO2 nanoplatelets by sublimation of MoO3 and its reduction in a hydrogen atmosphere at 750 °C. When grown on Si/SiO2 substrates, the platelets primarily assume a rhomboidal shape and have thicknesses ranging from several to tens of nm. The morphology of MoO2 crystals was found to depend on the chemical nature of substrates. MoO2 platelets on Si/SiO2 were characterized by a number of microscopic and spectroscopic techniques, and the electrical measurements revealed the metallic nature of their conductivity averaging at 2400 ±1000 S cm-1. Raman spectroscopy of MoO2 platelets on graphene indicates their strong hole injection property. Small thickness, planar morphology, high chemical stability and metallic conductivity of ultrathin MoO2 platelets make them potentially interesting for integration different other two-dimensional materials in a variety of electronic structures and devices.",

keywords = "MoO nanoplatelets, chemical vapor deposition, electrical measurements",

author = "Vorobeva, {Nataliia S.} and Alexey Lipatov and Muratov, {Dmitry S.} and Alexander Sinitskii",

note = "Funding Information: This work was supported by the National Science Foundation (NSF) through the Nebraska Materials Research Science and Engineering Center (MRSEC) (grant no. DMR-1420645) and ECCS-1740136, as well as by the NCORE, a wholly owned subsidiary of the Semiconductor Research Corporation (SRC). The materials characterization was performed in part in MISIS, in which the work was supported by the Ministry of Education and Science of the Russian Federation (K2-2016-033), and in the Nebraska Nanoscale Facility, which is supported by the NSF (ECCS-1542182) and the Nebraska Research Initiative. Publisher Copyright: {\textcopyright} 2018 IOP Publishing Ltd.",

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AU - Sinitskii, Alexander

N1 - Funding Information: This work was supported by the National Science Foundation (NSF) through the Nebraska Materials Research Science and Engineering Center (MRSEC) (grant no. DMR-1420645) and ECCS-1740136, as well as by the NCORE, a wholly owned subsidiary of the Semiconductor Research Corporation (SRC). The materials characterization was performed in part in MISIS, in which the work was supported by the Ministry of Education and Science of the Russian Federation (K2-2016-033), and in the Nebraska Nanoscale Facility, which is supported by the NSF (ECCS-1542182) and the Nebraska Research Initiative. Publisher Copyright: © 2018 IOP Publishing Ltd.

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N2 - We report on the chemical vapor deposition synthesis of MoO2 nanoplatelets by sublimation of MoO3 and its reduction in a hydrogen atmosphere at 750 °C. When grown on Si/SiO2 substrates, the platelets primarily assume a rhomboidal shape and have thicknesses ranging from several to tens of nm. The morphology of MoO2 crystals was found to depend on the chemical nature of substrates. MoO2 platelets on Si/SiO2 were characterized by a number of microscopic and spectroscopic techniques, and the electrical measurements revealed the metallic nature of their conductivity averaging at 2400 ±1000 S cm-1. Raman spectroscopy of MoO2 platelets on graphene indicates their strong hole injection property. Small thickness, planar morphology, high chemical stability and metallic conductivity of ultrathin MoO2 platelets make them potentially interesting for integration different other two-dimensional materials in a variety of electronic structures and devices.

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