Confocal scanning acoustic air microscope with phase contrast

Z. Kojro; T. J. Kim; M. Schmachtl; M. Schubert; T. Gudra; W. Grill

doi:10.1016/S0041-624X(97)00083-8

Confocal scanning acoustic air microscope with phase contrast

Z. Kojro, T. J. Kim, M. Schmachtl, M. Schubert, T. Gudra, W. Grill

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Abstract

A scanning acoustic microscope with phase contrast (PSAM) operating in air at normal conditions has been developed. Spherical transducers with impedance matching layers were manufactured from piezoceramics and employed for the generation of focused ultrasonic waves and spatially resolved detection of reflected or transmitted waves. At 1.27 MHz a lateral resolution of about 220 μm is achieved. The distance resolution (in reflection) reaches 10 nm for 1 s total signal acquisition time. The instrument operates at a working distance of 11 mm with an aperture diameter of 18 mm.

Original language	English (US)
Pages (from-to)	513-516
Number of pages	4
Journal	Ultrasonics
Volume	36
Issue number	1-5
DOIs	https://doi.org/10.1016/S0041-624X(97)00083-8
State	Published - Feb 1998
Externally published	Yes

Keywords

Phase contrast
Scanning acoustic microscopy
Ultrasonic transducer
Ultrasound in air

ASJC Scopus subject areas

Acoustics and Ultrasonics

Access to Document

10.1016/S0041-624X(97)00083-8

Cite this

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title = "Confocal scanning acoustic air microscope with phase contrast",

abstract = "A scanning acoustic microscope with phase contrast (PSAM) operating in air at normal conditions has been developed. Spherical transducers with impedance matching layers were manufactured from piezoceramics and employed for the generation of focused ultrasonic waves and spatially resolved detection of reflected or transmitted waves. At 1.27 MHz a lateral resolution of about 220 μm is achieved. The distance resolution (in reflection) reaches 10 nm for 1 s total signal acquisition time. The instrument operates at a working distance of 11 mm with an aperture diameter of 18 mm.",

keywords = "Phase contrast, Scanning acoustic microscopy, Ultrasonic transducer, Ultrasound in air",

author = "Z. Kojro and Kim, {T. J.} and M. Schmachtl and M. Schubert and T. Gudra and W. Grill",

note = "Funding Information: This work has been supported by the Deutsche Forschungsgemeinschaft (Innovationskolleg {\textquoteleft}Phtino-mene an den Miniaturisierungsgrenzen{\textquoteright}, Teilprojekt D).",

year = "1998",

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doi = "10.1016/S0041-624X(97)00083-8",

language = "English (US)",

volume = "36",

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TY - JOUR

T1 - Confocal scanning acoustic air microscope with phase contrast

AU - Kojro, Z.

AU - Kim, T. J.

AU - Schmachtl, M.

AU - Schubert, M.

AU - Gudra, T.

AU - Grill, W.

N1 - Funding Information: This work has been supported by the Deutsche Forschungsgemeinschaft (Innovationskolleg ‘Phtino-mene an den Miniaturisierungsgrenzen’, Teilprojekt D).

PY - 1998/2

Y1 - 1998/2

N2 - A scanning acoustic microscope with phase contrast (PSAM) operating in air at normal conditions has been developed. Spherical transducers with impedance matching layers were manufactured from piezoceramics and employed for the generation of focused ultrasonic waves and spatially resolved detection of reflected or transmitted waves. At 1.27 MHz a lateral resolution of about 220 μm is achieved. The distance resolution (in reflection) reaches 10 nm for 1 s total signal acquisition time. The instrument operates at a working distance of 11 mm with an aperture diameter of 18 mm.

AB - A scanning acoustic microscope with phase contrast (PSAM) operating in air at normal conditions has been developed. Spherical transducers with impedance matching layers were manufactured from piezoceramics and employed for the generation of focused ultrasonic waves and spatially resolved detection of reflected or transmitted waves. At 1.27 MHz a lateral resolution of about 220 μm is achieved. The distance resolution (in reflection) reaches 10 nm for 1 s total signal acquisition time. The instrument operates at a working distance of 11 mm with an aperture diameter of 18 mm.

KW - Phase contrast

KW - Scanning acoustic microscopy

KW - Ultrasonic transducer

KW - Ultrasound in air

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JO - Ultrasonics

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SN - 0041-624X

IS - 1-5

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Confocal scanning acoustic air microscope with phase contrast

Abstract

Keywords

ASJC Scopus subject areas

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