Confocal scanning acoustic air microscope with phase contrast

Z. Kojro, T. J. Kim, M. Schmachtl, M. Schubert, T. Gudra, W. Grill

Research output: Contribution to journalArticlepeer-review

3 Scopus citations

Abstract

A scanning acoustic microscope with phase contrast (PSAM) operating in air at normal conditions has been developed. Spherical transducers with impedance matching layers were manufactured from piezoceramics and employed for the generation of focused ultrasonic waves and spatially resolved detection of reflected or transmitted waves. At 1.27 MHz a lateral resolution of about 220 μm is achieved. The distance resolution (in reflection) reaches 10 nm for 1 s total signal acquisition time. The instrument operates at a working distance of 11 mm with an aperture diameter of 18 mm.

Original languageEnglish (US)
Pages (from-to)513-516
Number of pages4
JournalUltrasonics
Volume36
Issue number1-5
DOIs
StatePublished - Feb 1998
Externally publishedYes

Keywords

  • Phase contrast
  • Scanning acoustic microscopy
  • Ultrasonic transducer
  • Ultrasound in air

ASJC Scopus subject areas

  • Acoustics and Ultrasonics

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