Abstract
A scanning acoustic microscope with phase contrast (PSAM) operating in air at normal conditions has been developed. Spherical transducers with impedance matching layers were manufactured from piezoceramics and employed for the generation of focused ultrasonic waves and spatially resolved detection of reflected or transmitted waves. At 1.27 MHz a lateral resolution of about 220 μm is achieved. The distance resolution (in reflection) reaches 10 nm for 1 s total signal acquisition time. The instrument operates at a working distance of 11 mm with an aperture diameter of 18 mm.
Original language | English (US) |
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Pages (from-to) | 513-516 |
Number of pages | 4 |
Journal | Ultrasonics |
Volume | 36 |
Issue number | 1-5 |
DOIs | |
State | Published - Feb 1998 |
Externally published | Yes |
Keywords
- Phase contrast
- Scanning acoustic microscopy
- Ultrasonic transducer
- Ultrasound in air
ASJC Scopus subject areas
- Acoustics and Ultrasonics