TY - JOUR
T1 - Control of etching behavior of MnZn ferrite in a laser-chemical reaction by MeV ion beam modification
AU - Lu, Y. F.
AU - Takai, M.
AU - Namba, S.
AU - Sanda, H.
AU - Chayahara, A.
AU - Satou, M.
PY - 1991/7/1
Y1 - 1991/7/1
N2 - Laser-induced etching of MnZn ferrite samples implanted with MeV ions has been investigated. The etching induced by Ar+ -laser irradiation in a H3PO4 solution was completely suppressed by implanting 3 MeV Au+ to a dose of 1 × 1016 cm-2 when the laser-induced local temperature rise was below the melting point of the ferrite. The etching suppression disappeared when the Au+ -implanted sample was thermally annealed at 900° C for 30 min. The suppression is found to be related to the crystallinity change induced by ion implantation. The decrease in surface magnetization induced by ion implantation can be recovered by thermal annealing at 900° C for 30 min.
AB - Laser-induced etching of MnZn ferrite samples implanted with MeV ions has been investigated. The etching induced by Ar+ -laser irradiation in a H3PO4 solution was completely suppressed by implanting 3 MeV Au+ to a dose of 1 × 1016 cm-2 when the laser-induced local temperature rise was below the melting point of the ferrite. The etching suppression disappeared when the Au+ -implanted sample was thermally annealed at 900° C for 30 min. The suppression is found to be related to the crystallinity change induced by ion implantation. The decrease in surface magnetization induced by ion implantation can be recovered by thermal annealing at 900° C for 30 min.
UR - http://www.scopus.com/inward/record.url?scp=44949272360&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=44949272360&partnerID=8YFLogxK
U2 - 10.1016/0168-583X(91)95720-X
DO - 10.1016/0168-583X(91)95720-X
M3 - Article
AN - SCOPUS:44949272360
SN - 0168-583X
VL - 59-60
SP - 861
EP - 864
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
IS - PART 2
ER -