TY - JOUR
T1 - Controllable photon energy deposition efficiency in laser processing of fused silica by temporally shaped femtosecond pulse
T2 - Experimental and theoretical study
AU - Du, Kun
AU - Li, Xiaowei
AU - Zhang, Hao
AU - Huang, Ji
AU - Wang, Zhi
AU - Yao, Zhulin
AU - Lu, Yongfeng
N1 - Funding Information:
This research was supported by the National Natural Science Foundation of China (NSFC) ( 51605029 , 51675049 ), National Key R&D Program of China ( 2018YFB1107200 ), Natural Science Foundation of Beijing Municipality ( 3172027 ).
Publisher Copyright:
© 2020 Elsevier Ltd
PY - 2020/8
Y1 - 2020/8
N2 - Photon energy deposition plays a crucial role in femtosecond laser irradiation followed by chemical etching processing, which is an emerging technique for the better control of micro/nano structures on fused silica. In this study, we have experimentally and theoretically studied the controllable photon energy deposition in laser irradiation of fused silica by temporally shaped femtosecond laser pulse trains. The experimental result shows that the photon energy deposition efficiency could be either reduced or enhanced by adjusting the total fluence of shaped pulse trains. Furthermore, the sub-pulse interval and intensity ratio of temporally shaped pulse trains were revealed to play a critical role in photon energy deposition. The corresponding experimental observations are qualitatively explained by a plasma model that considers the free electron generation processes and corresponding feedback on the photon energy deposition.
AB - Photon energy deposition plays a crucial role in femtosecond laser irradiation followed by chemical etching processing, which is an emerging technique for the better control of micro/nano structures on fused silica. In this study, we have experimentally and theoretically studied the controllable photon energy deposition in laser irradiation of fused silica by temporally shaped femtosecond laser pulse trains. The experimental result shows that the photon energy deposition efficiency could be either reduced or enhanced by adjusting the total fluence of shaped pulse trains. Furthermore, the sub-pulse interval and intensity ratio of temporally shaped pulse trains were revealed to play a critical role in photon energy deposition. The corresponding experimental observations are qualitatively explained by a plasma model that considers the free electron generation processes and corresponding feedback on the photon energy deposition.
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U2 - 10.1016/j.optlastec.2020.106265
DO - 10.1016/j.optlastec.2020.106265
M3 - Article
AN - SCOPUS:85082691407
SN - 0030-3992
VL - 128
JO - Optics and Laser Technology
JF - Optics and Laser Technology
M1 - 106265
ER -