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Controllable Si (100) micro/nanostructures by chemical-etching-assisted femtosecond laser single-pulse irradiation
Xiaowei Li, Qian Xie, Lan Jiang, Weina Han, Qingsong Wang, Andong Wang, Jie Hu, Yongfeng Lu
Research output: Contribution to journal › Article › peer-review
16
Scopus
citations