Abstract
The synthesis of diamond-like carbon (DLC) films at room temperature by Nd:YAG pulsed laser (532 nm) irradiation of a polymer precursor is presented. The structures of films with the laser fluence were investigated by Raman spectroscopy. The morphologies of the resulting samples were examined by scanning electron microscopy (SEM), and the mechanism of DLC phases converted from the polymer is discussed. Raman spectrum analysis and SEM results indicate that the polymer is converted into amorphous carbon (a-C:H) phases with fluence from 60 to 650 mJ/cm2 and crystalline diamond in amorphous carbon matrix phases with fluence above 650 mJ/cm2 by pulsed laser irradiation in an argon gas atmosphere. It is proposed that the conversion of DLC phases is related to the special diamond-like structure of the polymer, and the laser provides an efficient thermal source.
Original language | English (US) |
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Pages (from-to) | 1154-1159 |
Number of pages | 6 |
Journal | Japanese Journal of Applied Physics |
Volume | 39 |
Issue number | 3 A |
DOIs | |
State | Published - 2000 |
Externally published | Yes |
Keywords
- Diamond
- Polymer precursor
- Pulsed laser
- Pyrolysis
ASJC Scopus subject areas
- Engineering(all)
- Physics and Astronomy(all)