Correlation of optical properties and structural analysis for cobalt silicide layers buried in silicon

C. H. Perry, F. Lu, F. Namavar, H. P. Maruska

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Fingerprint

Dive into the research topics of 'Correlation of optical properties and structural analysis for cobalt silicide layers buried in silicon'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds