Design and implementation of motion controllers for atomic force microscopy based nanomanipulation systems

Ruiguo Yang, King W.C. Lai, Bo Song, Ning Xi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Nanomanipulation with Atomic Force Microscopy (AFM) is one of the fundamental tools for nano-manufacturing. The motion control of the nanomanipulation system requires accurate feedback from the piezoelectric actuator and high frequency response from the control system. Since normal AFM control system for scanning motion is not suitable for controller of arbitrary motion, we therefore modified the hardware configuration to meet the demand of nanomanipulation control. By identifying the necessary parameters using system identification methods, we built up a new dynamic model for the modified configuration. Based on the new model and configuration, we designed and implemented a control scheme as motion controller for AFM nanomanipulation operation. The aims are to analyze various factors in the control of the AFM based nanomanipulation system. By integrating the original AFM controller with the external Linux real-time controller, we achieved a stable system with high frequency response. Several problems have been addressed based on the new control scheme, such as high frequency response, robust feedback control and non-linearity, etc. Finally this Multiple Input Single Output (MISO) system is validated by real-time nanomanipulation task. It is proved to be an effective and efficient tool for the controlling of the nanobiomanipulation operation by cutting the intercellular junction of human keratinocytes.

Original languageEnglish (US)
Title of host publication5th IFAC Symposium on Mechatronic Systems, MECHATRONICS 2010 - Proceedings
PublisherIFAC Secretariat
Pages429-434
Number of pages6
Edition18
ISBN (Print)9783902661760
DOIs
StatePublished - 2010
Event5th IFAC Symposium on Mechatronic Systems, MECHATRONICS 2010 - Cambridge, MA, United States
Duration: Sep 13 2010Sep 15 2010

Publication series

NameIFAC Proceedings Volumes (IFAC-PapersOnline)
Number18
Volume43
ISSN (Print)1474-6670

Other

Other5th IFAC Symposium on Mechatronic Systems, MECHATRONICS 2010
CountryUnited States
CityCambridge, MA
Period9/13/109/15/10

Keywords

  • AFM
  • Motion control
  • Nanolithography
  • Nanomanipulation

ASJC Scopus subject areas

  • Control and Systems Engineering

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