Design of a piezoelectric based sensor for applications at high temperature

B. R. Jooste, S. Schroeder, H. J. Viljoen

Research output: Chapter in Book/Report/Conference proceedingChapter

Abstract

Ta 2O 5 films were sputter deposited in a magnetron sputtering system. Piezoelectric sensing abilities were observed after annealing above 800 °C. Sensors annealed at 900 °C. showed good response at room temperature. The annealed β-Ta 2O 5 film was orthorhombic and had a symmetry of 2 mm. Inconel is a suitable substrate for high temperature sensing applications of piezoelectric β-Ta 2O 5.

Original languageEnglish (US)
Title of host publicationCeramic Engineering and Science Proceedings
PublisherAmerican Ceramic Soc
Pages739-746
Number of pages8
Volume18
Edition4 B
StatePublished - 1997
EventProceedings of the 1997 21st Annual Conference on Composites, Advanced Ceramics, Materials, and Structures-B - Cocoa, FL, USA
Duration: Jan 12 1997Jan 16 1997

Other

OtherProceedings of the 1997 21st Annual Conference on Composites, Advanced Ceramics, Materials, and Structures-B
CityCocoa, FL, USA
Period1/12/971/16/97

ASJC Scopus subject areas

  • Ceramics and Composites

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