Design of a piezoelectric based sensor for applications at high temperature

B. R. Jooste; S. Schroeder; H. J. Viljoen

Design of a piezoelectric based sensor for applications at high temperature

B. R. Jooste, S. Schroeder, H. J. Viljoen

Research output: Chapter in Book/Report/Conference proceeding › Chapter

Abstract

Ta ₂O ₅ films were sputter deposited in a magnetron sputtering system. Piezoelectric sensing abilities were observed after annealing above 800 °C. Sensors annealed at 900 °C. showed good response at room temperature. The annealed β-Ta ₂O ₅ film was orthorhombic and had a symmetry of 2 mm. Inconel is a suitable substrate for high temperature sensing applications of piezoelectric β-Ta ₂O ₅.

Original language	English (US)
Title of host publication	Ceramic Engineering and Science Proceedings
Publisher	American Ceramic Soc
Pages	739-746
Number of pages	8
Volume	18
Edition	4 B
State	Published - 1997
Event	Proceedings of the 1997 21st Annual Conference on Composites, Advanced Ceramics, Materials, and Structures-B - Cocoa, FL, USA Duration: Jan 12 1997 → Jan 16 1997

Other

Other	Proceedings of the 1997 21st Annual Conference on Composites, Advanced Ceramics, Materials, and Structures-B
City	Cocoa, FL, USA
Period	1/12/97 → 1/16/97

ASJC Scopus subject areas

Ceramics and Composites

Cite this

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title = "Design of a piezoelectric based sensor for applications at high temperature",

abstract = "Ta 2O 5 films were sputter deposited in a magnetron sputtering system. Piezoelectric sensing abilities were observed after annealing above 800 °C. Sensors annealed at 900 °C. showed good response at room temperature. The annealed β-Ta 2O 5 film was orthorhombic and had a symmetry of 2 mm. Inconel is a suitable substrate for high temperature sensing applications of piezoelectric β-Ta 2O 5. ",

author = "Jooste, {B. R.} and S. Schroeder and Viljoen, {H. J.}",

year = "1997",

language = "English (US)",

volume = "18",

pages = "739--746",

booktitle = "Ceramic Engineering and Science Proceedings",

publisher = "American Ceramic Soc",

edition = "4 B",

note = "Proceedings of the 1997 21st Annual Conference on Composites, Advanced Ceramics, Materials, and Structures-B ; Conference date: 12-01-1997 Through 16-01-1997",

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TY - CHAP

T1 - Design of a piezoelectric based sensor for applications at high temperature

AU - Jooste, B. R.

AU - Schroeder, S.

AU - Viljoen, H. J.

PY - 1997

Y1 - 1997

N2 - Ta 2O 5 films were sputter deposited in a magnetron sputtering system. Piezoelectric sensing abilities were observed after annealing above 800 °C. Sensors annealed at 900 °C. showed good response at room temperature. The annealed β-Ta 2O 5 film was orthorhombic and had a symmetry of 2 mm. Inconel is a suitable substrate for high temperature sensing applications of piezoelectric β-Ta 2O 5.

AB - Ta 2O 5 films were sputter deposited in a magnetron sputtering system. Piezoelectric sensing abilities were observed after annealing above 800 °C. Sensors annealed at 900 °C. showed good response at room temperature. The annealed β-Ta 2O 5 film was orthorhombic and had a symmetry of 2 mm. Inconel is a suitable substrate for high temperature sensing applications of piezoelectric β-Ta 2O 5.

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M3 - Chapter

AN - SCOPUS:0030675615

VL - 18

SP - 739

EP - 746

BT - Ceramic Engineering and Science Proceedings

PB - American Ceramic Soc

T2 - Proceedings of the 1997 21st Annual Conference on Composites, Advanced Ceramics, Materials, and Structures-B

Y2 - 12 January 1997 through 16 January 1997

ER -

Design of a piezoelectric based sensor for applications at high temperature

Abstract

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ASJC Scopus subject areas

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