DIELECTRIC RESPONSE OF 'DIAMONDLIKE' CARBON FILMS PREPARED BY RF PLASMA DEPOSITION.

Joel D. Lamb; John A. Woollam

DIELECTRIC RESPONSE OF 'DIAMONDLIKE' CARBON FILMS PREPARED BY RF PLASMA DEPOSITION.

Joel D. Lamb, John A. Woollam

Electrical & Computer Engineering

Research output: Contribution to journal › Conference article › peer-review

1 Scopus citations

Abstract

The so called 'Diamondlike' carbon (DLC) films are transparent in much of the visible, are hard and resistant to chemical attack. These films exhibit low electrical interface state densities when deposited on silicon and indium phosphide. Thus they are of interest for potential use as both gate and field dielectrics in high speed integrated circuits. This paper looks at how good these films are as dielectrics.

Original language	English (US)
Pages (from-to)	216
Number of pages	1
Journal	Extended Abstracts and Program - Biennial Conference on Carbon
State	Published - 1985

ASJC Scopus subject areas

Engineering(all)

Cite this

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title = "DIELECTRIC RESPONSE OF 'DIAMONDLIKE' CARBON FILMS PREPARED BY RF PLASMA DEPOSITION.",

abstract = "The so called 'Diamondlike' carbon (DLC) films are transparent in much of the visible, are hard and resistant to chemical attack. These films exhibit low electrical interface state densities when deposited on silicon and indium phosphide. Thus they are of interest for potential use as both gate and field dielectrics in high speed integrated circuits. This paper looks at how good these films are as dielectrics.",

author = "Lamb, {Joel D.} and Woollam, {John A.}",

year = "1985",

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pages = "216",

journal = "Extended Abstracts and Program - Biennial Conference on Carbon",

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T1 - DIELECTRIC RESPONSE OF 'DIAMONDLIKE' CARBON FILMS PREPARED BY RF PLASMA DEPOSITION.

AU - Lamb, Joel D.

AU - Woollam, John A.

PY - 1985

Y1 - 1985

N2 - The so called 'Diamondlike' carbon (DLC) films are transparent in much of the visible, are hard and resistant to chemical attack. These films exhibit low electrical interface state densities when deposited on silicon and indium phosphide. Thus they are of interest for potential use as both gate and field dielectrics in high speed integrated circuits. This paper looks at how good these films are as dielectrics.

AB - The so called 'Diamondlike' carbon (DLC) films are transparent in much of the visible, are hard and resistant to chemical attack. These films exhibit low electrical interface state densities when deposited on silicon and indium phosphide. Thus they are of interest for potential use as both gate and field dielectrics in high speed integrated circuits. This paper looks at how good these films are as dielectrics.

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M3 - Conference article

AN - SCOPUS:0022212191

SN - 0160-7464

SP - 216

JO - Extended Abstracts and Program - Biennial Conference on Carbon

JF - Extended Abstracts and Program - Biennial Conference on Carbon

ER -

DIELECTRIC RESPONSE OF 'DIAMONDLIKE' CARBON FILMS PREPARED BY RF PLASMA DEPOSITION.

Abstract

ASJC Scopus subject areas

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