DIELECTRIC RESPONSE OF 'DIAMONDLIKE' CARBON FILMS PREPARED BY RF PLASMA DEPOSITION.

Joel D. Lamb, John A. Woollam

Research output: Contribution to journalConference articlepeer-review

1 Scopus citations

Abstract

The so called 'Diamondlike' carbon (DLC) films are transparent in much of the visible, are hard and resistant to chemical attack. These films exhibit low electrical interface state densities when deposited on silicon and indium phosphide. Thus they are of interest for potential use as both gate and field dielectrics in high speed integrated circuits. This paper looks at how good these films are as dielectrics.

Original languageEnglish (US)
Pages (from-to)216
Number of pages1
JournalExtended Abstracts and Program - Biennial Conference on Carbon
StatePublished - 1985

ASJC Scopus subject areas

  • Engineering(all)

Fingerprint Dive into the research topics of 'DIELECTRIC RESPONSE OF 'DIAMONDLIKE' CARBON FILMS PREPARED BY RF PLASMA DEPOSITION.'. Together they form a unique fingerprint.

Cite this