Direct writing anisotropy on crystalline silicon surface by linearly polarized femtosecond laser

Pengjun Liu, Lan Jiang, Jie Hu, Weina Han, Yongfeng Lu

Research output: Contribution to journalArticle

15 Scopus citations

Abstract

An interesting anisotropy phenomenon in femtosecond laser processing of crystalline silicon is revealed by changing the angle between the writing direction and the laser polarization. The experimental results indicate the surface patterning is dependent on the laser polarization direction, showing that it is beneficial to forming continuous, ordered, and better-controlled ripples when the writing direction is parallel to the laser polarization. The anisotropy is attributed mainly to the elliptical shape of the induced ripples. The formation mechanisms of the elliptical ripples are also discussed. This observation promotes the fabrication of self-assembled subwavelength structures, which is important for electro-optic devices.

Original languageEnglish (US)
Pages (from-to)1969-1971
Number of pages3
JournalOptics Letters
Volume38
Issue number11
DOIs
StatePublished - Jun 1 2013

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics

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