TY - GEN
T1 - Drive level dependence of doubly rotated langasite resonators with different configurations
AU - Zhang, Haifeng
AU - Xie, Yuan
AU - Turner, Joseph A.
AU - Kosinski, John A.
PY - 2011
Y1 - 2011
N2 - The miniaturization of crystal resonators and filters towards the MEMS (Micro-Electro-Mechanical Systems) and nano-structured scales demands improvement of nonlinear piez oelectricity theory and a better understanding of th e nonlinear b ehavior of new crystal materials. The nonlin earities affect the quality factor and acousti c behavior of MEMS and nano-structured resonators and filters. Among these nonlinear effects, drive level dependence (DLD), which describes the instability of the resonator frequency due to voltage level and/or power density, is an urgent problem for miniaturized resonators. Langasite, a new promising piezoelectric material, is of recent interest for a variety of applications because of its good temperature behavior, good piezoelectric coupling, low acoustic loss and high Q factor. It has been recently used to make high temperature MEMS. In this article, experimental measurements of drive level dependence of langasite resonators with different configurations (plano-plano, single bevel, and double bevel) are reporte d. The results show that the resonator configuration affects the DL D of the l angasite resonator. The drive sensitivity of resonators with different configurations is determined.
AB - The miniaturization of crystal resonators and filters towards the MEMS (Micro-Electro-Mechanical Systems) and nano-structured scales demands improvement of nonlinear piez oelectricity theory and a better understanding of th e nonlinear b ehavior of new crystal materials. The nonlin earities affect the quality factor and acousti c behavior of MEMS and nano-structured resonators and filters. Among these nonlinear effects, drive level dependence (DLD), which describes the instability of the resonator frequency due to voltage level and/or power density, is an urgent problem for miniaturized resonators. Langasite, a new promising piezoelectric material, is of recent interest for a variety of applications because of its good temperature behavior, good piezoelectric coupling, low acoustic loss and high Q factor. It has been recently used to make high temperature MEMS. In this article, experimental measurements of drive level dependence of langasite resonators with different configurations (plano-plano, single bevel, and double bevel) are reporte d. The results show that the resonator configuration affects the DL D of the l angasite resonator. The drive sensitivity of resonators with different configurations is determined.
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U2 - 10.1109/FCS.2011.5977290
DO - 10.1109/FCS.2011.5977290
M3 - Conference contribution
AN - SCOPUS:80155167986
SN - 9781612841106
T3 - Proceedings of the IEEE International Frequency Control Symposium and Exposition
BT - 2011 Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum, IFCS/EFTF 2011 - Proceedings
T2 - 5th Joint Conference of the 65th IEEE International Frequency Control Symposium, IFCS 2011 and 25th European Frequency and Time Forum, EFTF 2011
Y2 - 1 May 2011 through 5 May 2011
ER -