Drive level dependence of doubly rotated langasite resonators with different configurations

Haifeng Zhang, Yuan Xie, Joseph A. Turner, John A. Kosinski

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The miniaturization of crystal resonators and filters towards the MEMS (Micro-Electro-Mechanical Systems) and nano-structured scales demands improvement of nonlinear piez oelectricity theory and a better understanding of th e nonlinear b ehavior of new crystal materials. The nonlin earities affect the quality factor and acousti c behavior of MEMS and nano-structured resonators and filters. Among these nonlinear effects, drive level dependence (DLD), which describes the instability of the resonator frequency due to voltage level and/or power density, is an urgent problem for miniaturized resonators. Langasite, a new promising piezoelectric material, is of recent interest for a variety of applications because of its good temperature behavior, good piezoelectric coupling, low acoustic loss and high Q factor. It has been recently used to make high temperature MEMS. In this article, experimental measurements of drive level dependence of langasite resonators with different configurations (plano-plano, single bevel, and double bevel) are reporte d. The results show that the resonator configuration affects the DL D of the l angasite resonator. The drive sensitivity of resonators with different configurations is determined.

Original languageEnglish (US)
Title of host publication2011 Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum, IFCS/EFTF 2011 - Proceedings
DOIs
StatePublished - 2011
Event5th Joint Conference of the 65th IEEE International Frequency Control Symposium, IFCS 2011 and 25th European Frequency and Time Forum, EFTF 2011 - San Fransisco, CA, United States
Duration: May 1 2011May 5 2011

Publication series

NameProceedings of the IEEE International Frequency Control Symposium and Exposition

Conference

Conference5th Joint Conference of the 65th IEEE International Frequency Control Symposium, IFCS 2011 and 25th European Frequency and Time Forum, EFTF 2011
CountryUnited States
CitySan Fransisco, CA
Period5/1/115/5/11

ASJC Scopus subject areas

  • Engineering(all)

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    Zhang, H., Xie, Y., Turner, J. A., & Kosinski, J. A. (2011). Drive level dependence of doubly rotated langasite resonators with different configurations. In 2011 Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum, IFCS/EFTF 2011 - Proceedings [5977290] (Proceedings of the IEEE International Frequency Control Symposium and Exposition). https://doi.org/10.1109/FCS.2011.5977290