Effect of deposition conditions on optical and electrical properties of ZnO films prepared by pulsed laser deposition

Ji Nan Zeng; Juay Kiang Low; Zhong Min Ren; Thomas Liew; Yong Feng Lu

doi:10.1016/S0169-4332(02)00425-7

Effect of deposition conditions on optical and electrical properties of ZnO films prepared by pulsed laser deposition

Ji Nan Zeng, Juay Kiang Low, Zhong Min Ren, Thomas Liew, Yong Feng Lu

Electrical & Computer Engineering

Research output: Contribution to journal › Conference article

188 Scopus citations

Abstract

We report the optical and electrical properties for highly c-axis oriented ZnO films deposited on Si (0 0 1) and quartz substrates by pulsed laser deposition (PLD) under various deposition conditions such as substrate temperature, laser fluence and oxygen ambient pressure. Dependence of structural, optical and electrical measurements on the substrate temperature reveals improvement of crystalline quality of ZnO films with raising substrate temperature. Optical and electrical properties show different behaviors in vacuum and oxygen ambient with increasing laser fluence. Combined with high laser fluence, oxygen ambient plays an important role in removing defects due to excess zinc or oxygen vacancy.

Original language	English (US)
Pages (from-to)	362-367
Number of pages	6
Journal	Applied Surface Science
Volume	197-198
DOIs	https://doi.org/10.1016/S0169-4332(02)00425-7
State	Published - 2002
Event	Cola 2001 - Tsukuba, Japan Duration: Oct 1 2001 → Oct 1 2001

Keywords

Pulsed laser deposition
Raman spectroscopy
Sheet resistivity
Transmittance spectra
X-ray diffraction
Zinc oxide

ASJC Scopus subject areas

Chemistry(all)
Condensed Matter Physics
Physics and Astronomy(all)
Surfaces and Interfaces
Surfaces, Coatings and Films

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10.1016/S0169-4332(02)00425-7

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title = "Effect of deposition conditions on optical and electrical properties of ZnO films prepared by pulsed laser deposition",

abstract = "We report the optical and electrical properties for highly c-axis oriented ZnO films deposited on Si (0 0 1) and quartz substrates by pulsed laser deposition (PLD) under various deposition conditions such as substrate temperature, laser fluence and oxygen ambient pressure. Dependence of structural, optical and electrical measurements on the substrate temperature reveals improvement of crystalline quality of ZnO films with raising substrate temperature. Optical and electrical properties show different behaviors in vacuum and oxygen ambient with increasing laser fluence. Combined with high laser fluence, oxygen ambient plays an important role in removing defects due to excess zinc or oxygen vacancy.",

keywords = "Pulsed laser deposition, Raman spectroscopy, Sheet resistivity, Transmittance spectra, X-ray diffraction, Zinc oxide",

author = "Zeng, {Ji Nan} and Low, {Juay Kiang} and Ren, {Zhong Min} and Thomas Liew and Lu, {Yong Feng}",

year = "2002",

doi = "10.1016/S0169-4332(02)00425-7",

language = "English (US)",

volume = "197-198",

pages = "362--367",

journal = "Applied Surface Science",

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note = "Cola 2001 ; Conference date: 01-10-2001 Through 01-10-2001",

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T1 - Effect of deposition conditions on optical and electrical properties of ZnO films prepared by pulsed laser deposition

AU - Zeng, Ji Nan

AU - Low, Juay Kiang

AU - Ren, Zhong Min

AU - Liew, Thomas

AU - Lu, Yong Feng

PY - 2002

Y1 - 2002

N2 - We report the optical and electrical properties for highly c-axis oriented ZnO films deposited on Si (0 0 1) and quartz substrates by pulsed laser deposition (PLD) under various deposition conditions such as substrate temperature, laser fluence and oxygen ambient pressure. Dependence of structural, optical and electrical measurements on the substrate temperature reveals improvement of crystalline quality of ZnO films with raising substrate temperature. Optical and electrical properties show different behaviors in vacuum and oxygen ambient with increasing laser fluence. Combined with high laser fluence, oxygen ambient plays an important role in removing defects due to excess zinc or oxygen vacancy.

AB - We report the optical and electrical properties for highly c-axis oriented ZnO films deposited on Si (0 0 1) and quartz substrates by pulsed laser deposition (PLD) under various deposition conditions such as substrate temperature, laser fluence and oxygen ambient pressure. Dependence of structural, optical and electrical measurements on the substrate temperature reveals improvement of crystalline quality of ZnO films with raising substrate temperature. Optical and electrical properties show different behaviors in vacuum and oxygen ambient with increasing laser fluence. Combined with high laser fluence, oxygen ambient plays an important role in removing defects due to excess zinc or oxygen vacancy.

KW - Pulsed laser deposition

KW - Raman spectroscopy

KW - Sheet resistivity

KW - Transmittance spectra

KW - X-ray diffraction

KW - Zinc oxide

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DO - 10.1016/S0169-4332(02)00425-7

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AN - SCOPUS:0141861712

VL - 197-198

SP - 362

EP - 367

JO - Applied Surface Science

JF - Applied Surface Science

SN - 0169-4332

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Y2 - 1 October 2001 through 1 October 2001

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