Abstract
We report the optical and electrical properties for highly c-axis oriented ZnO films deposited on Si (0 0 1) and quartz substrates by pulsed laser deposition (PLD) under various deposition conditions such as substrate temperature, laser fluence and oxygen ambient pressure. Dependence of structural, optical and electrical measurements on the substrate temperature reveals improvement of crystalline quality of ZnO films with raising substrate temperature. Optical and electrical properties show different behaviors in vacuum and oxygen ambient with increasing laser fluence. Combined with high laser fluence, oxygen ambient plays an important role in removing defects due to excess zinc or oxygen vacancy.
Original language | English (US) |
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Pages (from-to) | 362-367 |
Number of pages | 6 |
Journal | Applied Surface Science |
Volume | 197-198 |
DOIs | |
State | Published - 2002 |
Externally published | Yes |
Event | Cola 2001 - Tsukuba, Japan Duration: Oct 1 2001 → Oct 1 2001 |
Keywords
- Pulsed laser deposition
- Raman spectroscopy
- Sheet resistivity
- Transmittance spectra
- X-ray diffraction
- Zinc oxide
ASJC Scopus subject areas
- Chemistry(all)
- Condensed Matter Physics
- Physics and Astronomy(all)
- Surfaces and Interfaces
- Surfaces, Coatings and Films