Effect of implantation energy on surface pitting of SIMOX

F. Namavar, E. Cortesi, J. M. Manke, N. M. Kalkhoran, B. L. Buchanan, R. F. Pinizzotto, H. Yang

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Fingerprint Dive into the research topics of 'Effect of implantation energy on surface pitting of SIMOX'. Together they form a unique fingerprint.

Engineering & Materials Science