@inproceedings{0a3b907d933f43d8a8e8708e8e61f531,
title = "Electro machining of nano grooves using the AFM",
abstract = "Creation of nanoscale features is essential for the fabrication of nanoscale-integrated systems. This paper describes the use of the atomic force microscope (AFM) to generate nano cavities and nano grooves on copper samples. Deionized water was used as the machining medium and ultrashort voltage pulses were utilized. Several cavities were produced using the same AFM tip with a good repeatability. Grooves were also generated with different dimensions that go up to 13 μm in length (scanner range), 15 nm in depth, and 200 nm in width. Stability study was also done and it is shown that repeated scanning of the sample causes distortion of the created features. In-situ dimensional measurements were performed using NanoScope 5.30b15 software from digital instruments.",
keywords = "Atomic force microscope (AFM), Conductive tip, Dielectric, Grooves, Nano cavity, Stability",
author = "Alkhaleel, {A. H.} and Sundaram, {M. M.} and Rajurkar, {K. P.} and Malshe, {A. P.}",
note = "Funding Information: ACKNOWLEDGEMENTS Authors acknowledge the support from NSF (awards number: DMI - 0331830 and DMI - 0423697).; 15th International Symposium on Electromachining, ISEM 2007 ; Conference date: 23-04-2007 Through 27-04-2007",
year = "2007",
language = "English (US)",
series = "Proceedings of the 15th International Symposium on Electromachining, ISEM 2007",
publisher = "Industrial and Management Systems Engineering",
pages = "555--560",
editor = "Sundaram, {Murali Meenakshi} and K.P. Rajurkar and Resnick, {Ralph L.}",
booktitle = "Proceedings of the 15th International Symposium on Electromachining, ISEM 2007",
}