Electro machining of nano grooves using the AFM

A. H. Alkhaleel, M. M. Sundaram, K. P. Rajurkar, A. P. Malshe

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Creation of nanoscale features is essential for the fabrication of nanoscale-integrated systems. This paper describes the use of the atomic force microscope (AFM) to generate nano cavities and nano grooves on copper samples. Deionized water was used as the machining medium and ultrashort voltage pulses were utilized. Several cavities were produced using the same AFM tip with a good repeatability. Grooves were also generated with different dimensions that go up to 13 μm in length (scanner range), 15 nm in depth, and 200 nm in width. Stability study was also done and it is shown that repeated scanning of the sample causes distortion of the created features. In-situ dimensional measurements were performed using NanoScope 5.30b15 software from digital instruments.

Original languageEnglish (US)
Title of host publicationProceedings of the 15th International Symposium on Electromachining, ISEM 2007
EditorsMurali Meenakshi Sundaram, K.P. Rajurkar, Ralph L. Resnick
PublisherIndustrial and Management Systems Engineering
Pages555-560
Number of pages6
ISBN (Electronic)0979497701, 9780979497704
StatePublished - 2007
Event15th International Symposium on Electromachining, ISEM 2007 - Pittsburgh, United States
Duration: Apr 23 2007Apr 27 2007

Publication series

NameProceedings of the 15th International Symposium on Electromachining, ISEM 2007

Other

Other15th International Symposium on Electromachining, ISEM 2007
CountryUnited States
CityPittsburgh
Period4/23/074/27/07

Keywords

  • Atomic force microscope (AFM)
  • Conductive tip
  • Dielectric
  • Grooves
  • Nano cavity
  • Stability

ASJC Scopus subject areas

  • Industrial and Manufacturing Engineering
  • Electrical and Electronic Engineering

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