Electro machining of nano grooves using the AFM

Keyphrases

• Atomic Force Microscope 100%
• Nanogrooves 100%
• In Situ 50%
• Deionized Water 50%
• Good Repeatability 50%
• Atomic Force Microscope Tips 50%
• Nanoscale Features 50%
• Stability Study 50%
• Copper Samples 50%
• Nanocavity 50%
• Dimensional Measurement 50%
• Nanoscopic 50%
• Ultrashort Voltage Pulses 50%
• Digital Instrument 50%

Engineering

• Atomic Force Microscope 100%
• Nanoscale 66%
• Repeatability 33%
• Integrated System 33%
• Digital Instrument 33%

Material Science

• Machining 100%