Electron accumulation at nonpolar and semipolar surfaces of wurtzite InN from generalized infrared ellipsometry

V. Darakchieva, M. Schubert, T. Hofmann, B. Monemar, Ching Lien Hsiao, Ting Wei Liu, Li Chyong Chen, W. J. Schaff, Y. Takagi, Y. Nanishi

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Abstract

The free electron properties of nonpolar (11 2̄0) -oriented and semipolar (10 1̄1) -oriented wurtzite InN films are studied by generalized infrared ellipsometry (GIRSE). We demonstrate the sensitivity of GIRSE to the surface charge accumulation layer and find a distinct surface electron accumulation to occur at all surfaces. The obtained surface electron sheet densities are found to vary from 0.9× 1013 to 2.3× 1014 cm-2 depending on the surface orientation and bulk electron concentration. The upper limits of the surface electron mobility parameters of 417-644 cm2 /V s are determined and discussed in the light of electron confinement at the surface.

Original languageEnglish (US)
Article number202103
JournalApplied Physics Letters
Volume95
Issue number20
DOIs
StatePublished - 2009

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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    Darakchieva, V., Schubert, M., Hofmann, T., Monemar, B., Hsiao, C. L., Liu, T. W., Chen, L. C., Schaff, W. J., Takagi, Y., & Nanishi, Y. (2009). Electron accumulation at nonpolar and semipolar surfaces of wurtzite InN from generalized infrared ellipsometry. Applied Physics Letters, 95(20), [202103]. https://doi.org/10.1063/1.3261731