The free electron properties of nonpolar (11 2̄0) -oriented and semipolar (10 1̄1) -oriented wurtzite InN films are studied by generalized infrared ellipsometry (GIRSE). We demonstrate the sensitivity of GIRSE to the surface charge accumulation layer and find a distinct surface electron accumulation to occur at all surfaces. The obtained surface electron sheet densities are found to vary from 0.9× 1013 to 2.3× 1014 cm-2 depending on the surface orientation and bulk electron concentration. The upper limits of the surface electron mobility parameters of 417-644 cm2 /V s are determined and discussed in the light of electron confinement at the surface.
ASJC Scopus subject areas
- Physics and Astronomy (miscellaneous)