Electron cyclotron resonance etching of semiconductor structures studied by in-situ spectroscopic ellipsometry

Material Science

• Gallium Arsenide 100%
• Semiconductor Structure 100%
• Crystalline Material 33%
• Polymerization 33%
• Heterojunction 33%
• Amorphous Semiconductor 33%
• Surface Damage 33%
• Electronic Material 33%

Keyphrases

• Semiconductor Structures 100%
• Bruggeman Effective Medium 33%
• Medium Mixture 33%
• Damage Region 33%
• Voltage Power 33%
• Substrate Bias Voltage 33%

Chemical Engineering

• Polymerization 100%
• Spectroscopic Ellipsometry 100%