Energy approach to the modelling of particle removal by pulsed laser irradiation

Y. F. Lu, Y. W. Zheng, W. D. Song

Research output: Contribution to journalArticle

32 Scopus citations

Abstract

An energy model to explain particle removal mechanism has been developed. This model is based on a detailed investigation of contact deformation of a particle on a solid surface, as well as particle motion during the process of substrate surface expansion under uniform laser irradiation. Calculation results show that small particles mainly gain kinetic energy during pulsed laser irradiation, whereas large particles mainly gain elastic deforming potential energy. The particle removal condition is derived from the viewpoint of energy. The relationship of particle removal efficiency with laser fluence and particle size is discussed. Theoretical results are compared with experimental results.

Original languageEnglish (US)
Pages (from-to)569-572
Number of pages4
JournalApplied Physics A: Materials Science and Processing
Volume68
Issue number5
DOIs
StatePublished - May 1999

ASJC Scopus subject areas

  • Chemistry(all)
  • Materials Science(all)

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