Epitaxial growth and magnetic properties of Cr-doped AlN thin films

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15 Scopus citations


Cr-doped AlN thin films were epitaxially grown on Al2O 3(001) substrates at low temperature by reactive magnetron sputtering, and their magnetic properties were investigated. Extensive x-ray diffraction studies indicated that the films have a wurtzite-type hexagonal structure and are (001) oriented, with an epitaxial relationship of the [100] direction of the films along the [110] direction of Al2O 3. The c axis lattice parameter of the films showed a linear dependence on the Cr concentration for Cr concentrations below 0.15. Room temperature ferromagnetism was observed, and the magnetic properties showed strong dependence on the Cr concentration over a wide range.

Original languageEnglish (US)
Pages (from-to)3137-3142
Number of pages6
JournalJournal of Physics Condensed Matter
Issue number21
StatePublished - Jun 1 2005

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics


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