Etching Rate Control by MeV O+Implantation for Laser-Chemical Reaction of Ferrite

Yong Feng Lu, Mikio Takai, Akiyoshi Chayahara, Mamoru Satou, Susumu Namba, Hiroyuki Sanda, Syohei Nagatomo

Research output: Contribution to journalArticlepeer-review

9 Scopus citations

Fingerprint Dive into the research topics of 'Etching Rate Control by MeV O<sub>+</sub>Implantation for Laser-Chemical Reaction of Ferrite'. Together they form a unique fingerprint.

Physics & Astronomy

Engineering & Materials Science