Etching Rate Control by MeV O+Implantation for Laser-Chemical Reaction of Ferrite

Yong Feng Lu, Mikio Takai, Akiyoshi Chayahara, Mamoru Satou, Susumu Namba, Hiroyuki Sanda, Syohei Nagatomo

Research output: Contribution to journalArticle

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Physics & Astronomy

Engineering & Materials Science