Excimer-laser-induced micropatterning of silicon dioxide on silicon substrates

J. J. Yu, J. Y. Zhang, I. W. Boyd, Y. F. Lu

Research output: Contribution to journalArticlepeer-review

18 Scopus citations


Highly resolved micropatterns induced on SiO2-coated Si sample surfaces have been investigated using a KrF excimer laser (λ: 248 nm and τ: 23 ns). Uniform micropatterns were observed to form in the oxide layer after laser-induced melting of interfaces. The pattern size can be controlled either by the laser parameters or even by the oxide layer thickness. SEM analysis identified that the micropatterns were virtually initiated at the molten interface and the oxide layer followed the interface patterning to change its profile. Simulation of laser interaction with double-layered structures indicated that the oxide layer could melt or be ablated due to interface superheating when it was deposited on a highly absorbing Si substrate. IR analysis has demonstrated that the structural properties of the SiO2 layer undergo no appreciable changes after laser radiation. This process provides a possible basis for its application in micropatterning of transparent materials using excimer lasers.

Original languageEnglish (US)
Pages (from-to)35-39
Number of pages5
JournalApplied Physics A: Materials Science and Processing
Issue number1
StatePublished - Jan 2001
Externally publishedYes

ASJC Scopus subject areas

  • Chemistry(all)
  • Materials Science(all)


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