Excimer laser irradiation on NiP surface

D. M. Liu; Y. F. Lu; K. Y. Yiang; W. D. Song; M. H. Hong; T. S. Low

doi:10.1117/12.280570

Excimer laser irradiation on NiP surface

D. M. Liu, Y. F. Lu, K. Y. Yiang, W. D. Song, M. H. Hong, T. S. Low

Research output: Contribution to journal › Conference article › peer-review

2 Scopus citations

Abstract

In this study, nickel-phosphorous (NiP) surface is irradiated by a KrF excimer laser beam. Atomic force microscope (AFM) and x-ray diffraction (XRD) are employed to study the surface morphology and the material structure. For laser fluence from 124 mJ/cm² to 190 mJ/cm², thin periodic structure morphology is formed in the irradiated region. When laser fluence exceeds 200 mJ/cm², a microcosmic-smooth ripple morphology is obtained. The period of the second morphology is obviously larger than that of the first morphology. The morphology is dependent on the original surface condition, laser fluence and laser pulse number in the low laser fluence region and only laser fluence and laser pulse number in the high laser fluence region. One-dimensional thermal conduction model is used to predict the temperature rise in the irradiated region. Surface melting is predicted to take place at laser flunce about 200 mJ/cm². The interaction mechanism between laser beam and NiP surface is proposed based on the theoretical calculation and experiment.

Original language	English (US)
Pages (from-to)	166-174
Number of pages	9
Journal	Proceedings of SPIE - The International Society for Optical Engineering
Volume	3184
DOIs	https://doi.org/10.1117/12.280570
State	Published - 1997
Externally published	Yes
Event	Microelectronic Packaging and Laser Processing - Singapore, Singapore Duration: Jun 25 1997 → Jun 25 1997

Keywords

Excimer laser
Laser irradiation
Morphology
NiP surface

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

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10.1117/12.280570

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title = "Excimer laser irradiation on NiP surface",

abstract = "In this study, nickel-phosphorous (NiP) surface is irradiated by a KrF excimer laser beam. Atomic force microscope (AFM) and x-ray diffraction (XRD) are employed to study the surface morphology and the material structure. For laser fluence from 124 mJ/cm2 to 190 mJ/cm2, thin periodic structure morphology is formed in the irradiated region. When laser fluence exceeds 200 mJ/cm2, a microcosmic-smooth ripple morphology is obtained. The period of the second morphology is obviously larger than that of the first morphology. The morphology is dependent on the original surface condition, laser fluence and laser pulse number in the low laser fluence region and only laser fluence and laser pulse number in the high laser fluence region. One-dimensional thermal conduction model is used to predict the temperature rise in the irradiated region. Surface melting is predicted to take place at laser flunce about 200 mJ/cm2. The interaction mechanism between laser beam and NiP surface is proposed based on the theoretical calculation and experiment.",

keywords = "Excimer laser, Laser irradiation, Morphology, NiP surface",

author = "Liu, {D. M.} and Lu, {Y. F.} and Yiang, {K. Y.} and Song, {W. D.} and Hong, {M. H.} and Low, {T. S.}",

year = "1997",

doi = "10.1117/12.280570",

language = "English (US)",

volume = "3184",

pages = "166--174",

journal = "Proceedings of SPIE - The International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

note = "Microelectronic Packaging and Laser Processing ; Conference date: 25-06-1997 Through 25-06-1997",

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TY - JOUR

T1 - Excimer laser irradiation on NiP surface

AU - Liu, D. M.

AU - Lu, Y. F.

AU - Yiang, K. Y.

AU - Song, W. D.

AU - Hong, M. H.

AU - Low, T. S.

PY - 1997

Y1 - 1997

N2 - In this study, nickel-phosphorous (NiP) surface is irradiated by a KrF excimer laser beam. Atomic force microscope (AFM) and x-ray diffraction (XRD) are employed to study the surface morphology and the material structure. For laser fluence from 124 mJ/cm2 to 190 mJ/cm2, thin periodic structure morphology is formed in the irradiated region. When laser fluence exceeds 200 mJ/cm2, a microcosmic-smooth ripple morphology is obtained. The period of the second morphology is obviously larger than that of the first morphology. The morphology is dependent on the original surface condition, laser fluence and laser pulse number in the low laser fluence region and only laser fluence and laser pulse number in the high laser fluence region. One-dimensional thermal conduction model is used to predict the temperature rise in the irradiated region. Surface melting is predicted to take place at laser flunce about 200 mJ/cm2. The interaction mechanism between laser beam and NiP surface is proposed based on the theoretical calculation and experiment.

AB - In this study, nickel-phosphorous (NiP) surface is irradiated by a KrF excimer laser beam. Atomic force microscope (AFM) and x-ray diffraction (XRD) are employed to study the surface morphology and the material structure. For laser fluence from 124 mJ/cm2 to 190 mJ/cm2, thin periodic structure morphology is formed in the irradiated region. When laser fluence exceeds 200 mJ/cm2, a microcosmic-smooth ripple morphology is obtained. The period of the second morphology is obviously larger than that of the first morphology. The morphology is dependent on the original surface condition, laser fluence and laser pulse number in the low laser fluence region and only laser fluence and laser pulse number in the high laser fluence region. One-dimensional thermal conduction model is used to predict the temperature rise in the irradiated region. Surface melting is predicted to take place at laser flunce about 200 mJ/cm2. The interaction mechanism between laser beam and NiP surface is proposed based on the theoretical calculation and experiment.

KW - Excimer laser

KW - Laser irradiation

KW - Morphology

KW - NiP surface

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U2 - 10.1117/12.280570

DO - 10.1117/12.280570

M3 - Conference article

AN - SCOPUS:57649121674

SN - 0277-786X

VL - 3184

SP - 166

EP - 174

JO - Proceedings of SPIE - The International Society for Optical Engineering

JF - Proceedings of SPIE - The International Society for Optical Engineering

T2 - Microelectronic Packaging and Laser Processing

Y2 - 25 June 1997 through 25 June 1997

ER -

Excimer laser irradiation on NiP surface

Abstract

Keywords

ASJC Scopus subject areas

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