Experimental and numerical investigation of the surface reliefs formed on a moving silicon substrate by pulses of a Gaussian laser

Teng Soon Wee, Yong Feng Lu, Wai Kin Chim

Research output: Contribution to journalArticlepeer-review

Abstract

When pulses of a Gaussian laser beam with sufficient energy intensity are applied on to the surface of a moving substrate, interesting surface reliefs can be formed at the spots where the beam strikes the substrate. In this paper, experimental findings of such laser-induced melt reliefs formed on the surface of a silicon substrate using laser pulses from a CW Ar+ laser are reported. The dependence of the size of the reliefs on parameters such as the power of the laser beam and the speed at which the substrate moves under the laser irradiation are investigated. A numerical finite element routine has also been developed to model the laser melting problem. With the help of the melting model, attempts to deduce the formation of these melt reliefs have been carried out.

Original languageEnglish (US)
Pages (from-to)205-209
Number of pages5
JournalMaterials Chemistry and Physics
Volume54
Issue number1-3
DOIs
StatePublished - Jul 1998
Externally publishedYes

Keywords

  • Laser induced temperature profile
  • Laser-induced melt relief
  • Numerical laser melting model
  • Pulsed laser melting
  • Silicon

ASJC Scopus subject areas

  • Materials Science(all)
  • Condensed Matter Physics

Fingerprint Dive into the research topics of 'Experimental and numerical investigation of the surface reliefs formed on a moving silicon substrate by pulses of a Gaussian laser'. Together they form a unique fingerprint.

Cite this